Laser Crystallization of Silicon - Fundamentals to Devices
Seiten
2003
Academic Press Inc (Verlag)
978-0-12-752184-8 (ISBN)
Academic Press Inc (Verlag)
978-0-12-752184-8 (ISBN)
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Reviews the experimental and theoretical studies in the field of laser crystallization of silicon . This work covers the phenomena related to the laser crystallization process and the properties of the resulting polycrystalline silicon. It also contains applications for industry, particularly in the fabrication of thin-film electronics.
This book on the Laser Crystallization of Silicon reviews the latest experimental and theoretical studies in the field. It has been written by recognised global authorities and covers the most recent phenomena related to the laser crystallization process and the properties of the resulting polycrystalline silicon.
Reflecting the truly interdisciplinary nature of the field that the series covers, this volume will continue to be of great interest to physicists, chemists, materials scientists and device engineers in modern industry.
This book on the Laser Crystallization of Silicon reviews the latest experimental and theoretical studies in the field. It has been written by recognised global authorities and covers the most recent phenomena related to the laser crystallization process and the properties of the resulting polycrystalline silicon.
Reflecting the truly interdisciplinary nature of the field that the series covers, this volume will continue to be of great interest to physicists, chemists, materials scientists and device engineers in modern industry.
Preface; introduction to laser crystallization of silicon; heat transfer and phase transformations in laser melting and recrystallization of amorphous thin si films; modelling laser-induced phase change processes: theory and computation; laser interference crystallization of amorphous films; structural and electronic properties of laser crystallized poly-si.
| Erscheint lt. Verlag | 12.12.2003 |
|---|---|
| Reihe/Serie | Semiconductors and Semimetals |
| Verlagsort | San Diego |
| Sprache | englisch |
| Maße | 165 x 241 mm |
| Gewicht | 540 g |
| Themenwelt | Naturwissenschaften ► Chemie ► Anorganische Chemie |
| Technik | |
| ISBN-10 | 0-12-752184-4 / 0127521844 |
| ISBN-13 | 978-0-12-752184-8 / 9780127521848 |
| Zustand | Neuware |
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