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Silicon Epitaxy

Danilo Crippa, Daniel L. Rode (Herausgeber)

Buch | Hardcover

491 Seiten

2001
Academic Press Inc (Verlag)
978-0-12-752181-7 (ISBN)

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Since its inception in 1966, the series of numbered volumes known as Semiconductors and Semimetals has distinguished itself through the careful selection of well-known authors, editors, and contributors. The Willardson and Beer series, as it is widely known, has succeeded in producing numerous landmark volumes and chapters. Not only did many of these volumes make an impact at the time of their publication, but they continue to be well-cited years after their original release. Recently, Professor Eicke R. Weber of the University of California at Berkeley joined as a co-editor of the series. Professor Weber, a well-known expert in the field of semiconductor materials, will further contribute to continuing the series' tradition of publishing timely, highly relevant, and long-impacting volumes. Some of the recent volumes, such as Hydrogen in Semiconductors, Imperfections in III/V Materials, Epitaxial Microstructures, High-Speed Heterostructure Devices, Oxygen in Silicon, and others promise that this tradition will be maintained and even expanded.

1: CVD Technologies for Silicon: A Quick Survey
2: Epitaxial Growth Theory: Vapor-Phase Chemistry and Doping
3: Epitaxial Growth Facilities, Equipment, and Supplies
4: Epitaxial Growth Techniques
5: Epitaxial Growth Techniques: Molecular Beam Epitaxy
6: Epitaxial Growth Modeling
7: Epitaxial Layer Characterization and Metrology
8: Epitaxy for Discretes and Power Devices
9: Epitaxy on Patterned Wafers
10: Si-Based Alloys: SiGe and SiGe:C
11: Silicon Epitaxy: New Applications

Erscheint lt. Verlag	26.9.2001
Reihe/Serie	Semiconductors and Semimetals
Mitarbeit	Herausgeber (Serie): J. A. Rossi, Robert K. Willardson, Eicke R. Weber
Verlagsort	San Diego
Sprache	englisch
Maße	152 x 229 mm
Gewicht	800 g
Themenwelt	Naturwissenschaften ► Physik / Astronomie ► Elektrodynamik
Themenwelt	Technik ► Elektrotechnik / Energietechnik
ISBN-10	0-12-752181-X / 012752181X
ISBN-13	978-0-12-752181-7 / 9780127521817
Zustand	Neuware