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Introduction to Focused Ion Beams

Instrumentation, Theory, Techniques and Practice

Lucille A. Giannuzzi, North Carolina State University (Herausgeber)

Buch | Hardcover

357 Seiten

2004
Springer-Verlag New York Inc.
978-0-387-23116-7 (ISBN)

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Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.

The Focused Ion Beam Instrument.- Ion - Solid Interactions.- Focused Ion Beam Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Focused Ion Beams.- Device Edits and Modifications.- The Uses of Dual Beam FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy.- FIB for Materials Science Applications - a Review.- Practical Aspects of FIB Tem Specimen Preparation.- FIB Lift-Out Specimen Preparation Techniques.- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method.- Dual-Beam (FIB-SEM) Systems.- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS).- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy.- Application of FIB in Combination with Auger Electron Spectroscopy.

Zusatzinfo	28 Illustrations, color; 6 Illustrations, black and white; XVII, 357 p. 34 illus., 28 illus. in color.
Verlagsort	New York, NY
Sprache	englisch
Maße	155 x 235 mm
Themenwelt	Naturwissenschaften ► Physik / Astronomie ► Atom- / Kern- / Molekularphysik
	Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik
	Naturwissenschaften ► Physik / Astronomie ► Hochenergiephysik / Teilchenphysik
	Naturwissenschaften ► Physik / Astronomie ► Thermodynamik
ISBN-10	0-387-23116-1 / 0387231161
ISBN-13	978-0-387-23116-7 / 9780387231167
Zustand	Neuware