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Nano Plating - Microstructure Formation Theory of Plated Films and a Database of Plated Films -  Tohru Watanabe

Nano Plating - Microstructure Formation Theory of Plated Films and a Database of Plated Films (eBook)

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2004 | 1. Auflage
714 Seiten
Elsevier Science (Verlag)
978-0-08-053725-2 (ISBN)
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(CHF 175,35)
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Modern plating technology is highly advanced, and has developed to cover a wide range of applications. In addition to the traditional use for surface finishing, plating technology can now offer novel processes to fabricate high-performance films or fine microstructural bodies in the microelectronics industry. This rapid progress reflects the potential for the electroplating plating method to become one of today's leading-edge technologies. This book will introduce a concept of a Microstructure Control Theory for plated films, describe and discuss various experimental results that support the theory, and finally, present a collection of experimental data on 53 types of plated metal/alloy systems with a special emphasis on their microstructure.The unique feature of this database is that most of the plating baths are simple and contain no additives. In addition, amorphous materials were used as substrates to avoid the effects of substrate structure, and single-crystal substrates were chosen to study the epitaxial growth phenomenon.

* Contains a comprehensive database for the microstructure of plated films

* The book is very logically structured with a very detailed contents which makes finding information easy

* The book gives a very good overview of the research and development in this field and each chapter is fully referenced
Modern plating technology is highly advanced, and has developed to cover a wide range of applications. In addition to the traditional use for surface finishing, plating technology can now offer novel processes to fabricate high-performance films or fine microstructural bodies in the microelectronics industry. This rapid progress reflects the potential for the electroplating plating method to become one of today's leading-edge technologies. This book will introduce a concept of a Microstructure Control Theory for plated films, describe and discuss various experimental results that support the theory, and finally, present a collection of experimental data on 53 types of plated metal/alloy systems with a special emphasis on their microstructure.The unique feature of this database is that most of the plating baths are simple and contain no additives. In addition, amorphous materials were used as substrates to avoid the effects of substrate structure, and single-crystal substrates were chosen to study the epitaxial growth phenomenon.* Contains a comprehensive database for the microstructure of plated films* The book is very logically structured with a very detailed contents which makes finding information easy* The book gives a very good overview of the research and development in this field and each chapter is fully referenced

Front Cover 1
Nano-Plating: Microstructure Control Theory of Plated Film and Data Base of Plated Film Microstructure 4
Copyright Page 5
Contents 12
Preface 6
Chapter 1. Microstructure Control Theory of Plated Film 20
1.1. Introduction 20
1.2. Research Process of Plating Technology 21
1.3. Review of Previous TMC and Practical Plated Films 24
1.4. Theory of Microstructure Control for Plated Films 27
References 108
Chapter 2. Film Formation Mechanism in Electrodeposition 114
2.1. Formation of Electrolytic Films 114
2.2. Electroless Films 138
References 155
Chapter 3. Plating in Organic Electrolyte 158
3.1. Introduction 160
3.2. Experimental Methods 161
3.3. Selection of Plating Electrolyte 163
3.4. Cobalt Deposition from Various Organic Solvent Solutions 169
References 187
Chapter 4. Microstructural Changes in Plated Films During Heat Treatment 190
4.1. Introduction 192
4.2. A Change of Meta-Stable and Non-Equilibrium Phases to Stable Crystals 193
4.3. Transformation of Amorphous Phase to Equilibrium Phase 199
References 209
Chapter 5. Control of Macrostructure in Plated Films and Fabrication of Three-Dimensional Microstructure 212
5.1. Introduction 214
5.2. Macrostructure Control in Plated Films 214
5.3. Fabrication of Three-Dimensional Microstructural Body 221
References 221
Chapter 6. Characterization Methods for Plated Films 224
6.1. Structure of Metal Substrates 226
6.2. Structural Determination of Plated Films 232
6.3. Grain-Size Measurements 252
6.4. Observations of Surface Morphology 257
6.5. Measurement of Preferred Orientation 265
References 269
Chapter 7. Database for the Microstructure of Plated Films 272
7.1. Introduction 274
7.2. Plating Methods 274
7.3. Microstructure Observations and Measurements Methods for Plated Films 276
7.4. Database for the Microstructure of Plated Films 277
Index 714

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