Very Large Scale Integration Metalization Technologies

Krishna Shenai (Autor)

Buch | Hardcover

505 Seiten

1991
Artech House Publishers (Verlag)
978-0-89006-501-3 (ISBN)

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This collection of articles presents developments in VSLI contact and connected technologies and applications. Subjects covered include opto-electronic interconnects and testing, multichip packaging and metallization reliability and multilevel metallization technologies.

Device and circuit interconnects - a perspective; physics and modelling of metal-semiconductor heterojunctions; metal/silicide-silicon contacts; multilevel metallization technologies; metallization of compound semiconductors; optoelectronic interconnects and testing; multichip packaging and metallization and reliability.

Erscheint lt. Verlag	12.12.1991
Reihe/Serie	Electronic Materials & Devices Library
Zusatzinfo	bibliography
Verlagsort	Norwood
Sprache	englisch
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Themenwelt	Technik ► Maschinenbau
ISBN-10	0-89006-501-2 / 0890065012
ISBN-13	978-0-89006-501-3 / 9780890065013
Zustand	Neuware