Microsystems Mechanical Design

Francesco De Bona, Eniko T. Enikov (Herausgeber)

Buch | Softcover

VII, 211 Seiten

2006 | 2006
Springer Wien (Verlag)
978-3-211-37453-5 (ISBN)

Artikel merken

Nowadays, micromechanics (i.e., mechanics of microsystems) is probably one of the most promising and rapidly growing fields among new emerging technologies. In fact, the possibility of reducing the size of mechanical structures to the micro-domain opens a wide variety of possible applications in the biomedical, aeronautical, and automotive fields, in robotics, in molecular engineering, in fiber optics, and infiuidics technology. One of the main aspects that slows down the development of innovative industrial products based on microsystem technology is the existing lack of engineering tools to allow a reliable design of microsystems . The aim of this book is that of collecting the texts o the lectures given at the CISM course on: Microsystems Mechanical Design, hold in July 2004. The purpose of this course was to introduce the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies were also discussed and light was shed on the potential applications of microsystems to nano-scale manipulation of matter, thus introducing the topic of nano-scale engineering mechanics, which will be fully explored in a future course. This book is arranged in 8 sections. In the first section an introduction on microsystems and the techniques for their fabrication will be presented, with a thoroughly description of surface and bulk micromachining techniques and of other microfabrication processes as LIGA and anoding bonding.

Francesco De Bona, University of Udine, Italy. Eniko T. Enikov, University of Arizona, USA.

to Micro-Systems and to the Techniques for Their Fabrication.- Microstructures Under Electrostatic Loads: Discrete System Modelling.- Dynamics of Mechatronic Systems at Microscale.- Continuum Microstructures Loaded Electrostatically.- Design of Electro-Thermal Micro-Actuators: Mechanics and Electronic Position Detection.- Design of Compliant Micromechanisms.- Micro- and Nano-assembly and Manipulation Techniques for MEMS.- Microfluidics: Device Science and Technology.

Erscheint lt. Verlag	1.9.2006
Reihe/Serie	CISM International Centre for Mechanical Sciences
Zusatzinfo	VII, 211 p.
Verlagsort	Vienna
Sprache	englisch
Maße	170 x 240 mm
Gewicht	790 g
Themenwelt	Technik ► Maschinenbau
Schlagworte	Behavior • Design • Dynamics • Engineering mechanics • fluidics • Mechanics • Mechanism • mechanisms • microelectromechanical system (MEMS) • microfluidics • Micromechanics • microstructure • microsystems • Modeling • nano-scale • Nanotechnologie • nanotechnology
ISBN-10	3-211-37453-1 / 3211374531
ISBN-13	978-3-211-37453-5 / 9783211374535
Zustand	Neuware