Micro Electro Mechanical System Design
Seiten
2005
Crc Press Inc (Verlag)
978-0-8247-5824-0 (ISBN)
Crc Press Inc (Verlag)
978-0-8247-5824-0 (ISBN)
Offers information helpful to develop a successful micro electro mechanical system (MEMS) design. This work explains the design process by illustrating the range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.
The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development:
Understanding the fabrication technologies that are available
Recognizing the relevant physics involved for micron scale devices
Considering implementation issues applicable to computer aided design
Focusing on the engineering details and the subsequent evaluation testing
Maintaining an eye for detail regarding both reliability and packaging
These issues are fully addressed in this book, along with questions and problems at the end of each chapter that promote review and further contemplation of each topic. In addition, the appendices offer information that complement each stage of project design and development.
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.
The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development:
Understanding the fabrication technologies that are available
Recognizing the relevant physics involved for micron scale devices
Considering implementation issues applicable to computer aided design
Focusing on the engineering details and the subsequent evaluation testing
Maintaining an eye for detail regarding both reliability and packaging
These issues are fully addressed in this book, along with questions and problems at the end of each chapter that promote review and further contemplation of each topic. In addition, the appendices offer information that complement each stage of project design and development.
James J. Allen
Introduction. Fabrication Processes. MEMS Technologies. Scaling Issues for MEMS. Design Realization Tools for MEMS. Electro-Mechanics. Modeling and Design.
MEMS Sensors and Actuators. Packaging. Reliability. Appendix.
Erscheint lt. Verlag | 8.7.2005 |
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Reihe/Serie | Mechanical Engineering |
Zusatzinfo | 51 Tables, black and white; 318 Illustrations, black and white |
Verlagsort | Bosa Roca |
Sprache | englisch |
Maße | 152 x 229 mm |
Gewicht | 793 g |
Themenwelt | Technik ► Elektrotechnik / Energietechnik |
Technik ► Maschinenbau | |
Technik ► Umwelttechnik / Biotechnologie | |
ISBN-10 | 0-8247-5824-2 / 0824758242 |
ISBN-13 | 978-0-8247-5824-0 / 9780824758240 |
Zustand | Neuware |
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