MEMS Module. Multistage Micro-Hydraulic Displacement Amplifier Actuation

Animesh Saha (Autor)

Buch | Softcover

20 Seiten

2021
GRIN Verlag
978-3-346-45793-6 (ISBN)

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Akademische Arbeit aus dem Jahr 2016 im Fachbereich Elektrotechnik, , Sprache: Deutsch, Abstract: This paper explains the importance of Micro-Electro-Mechanical Systems (MEMS) in the modern world.The last 30 years of Micro-Electro-Mechanical Systems (MEMS) have been seen as an era of exponential development of electronic devices such as sensors and actuators on the order of micro dimension. Throughout these three decades, MEMS becomes the key to make a multibillion dollar industrial production from the very beginning of the research and experimental outcomes in the laboratories. Besides the electronic devices there are lots of applications of MEMS in small robotics is found today. Different types of MEMS actuators are designed to study and lots of diverse researches have been conducted on those designs to build small microrobots.

Erscheinungsdatum	16.09.2021
Sprache	deutsch
Maße	148 x 210 mm
Gewicht	45 g
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Schlagworte	Displacement Amplifier • DisplacementAmplifier • Elektrotechnik • MEMS • MEMS Micro-hydraulic Multistage Displacement Amplifier • MEMSMicro-hydraulicMultistageDisplacementAmplifier • micro hydraulics • Microhydraulics • multistage • Multistage Amplifier • MultistageAmplifier • Multistage Displacement Amplifier • MultistageDisplacementAmplifier • Multistage MEMS Amplifier • MultistageMEMSAmplifier • Piezoelectric Microfluidics • PiezoelectricMicrofluidics
ISBN-10	3-346-45793-1 / 3346457931
ISBN-13	978-3-346-45793-6 / 9783346457936
Zustand	Neuware