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Excimer Laser Technology

Dirk Basting, Gerd Marowsky (Herausgeber)

Buch | Hardcover
XX, 433 Seiten
2005 | 2005
Springer Berlin (Verlag)
978-3-540-20056-7 (ISBN)

Lese- und Medienproben

Excimer Laser Technology -
CHF 419,40 inkl. MwSt

 This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F laser technology. 

Additional chapters on optics, devices and laser systems complete this compact handbook.

A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.

Introductory Remarks.- Fundamentals.- Some Fundamentals of Laser Physics.- Principles of Excimer Lasers.- Design and Technology of Excimer Lasers.- High-Repetition-Rate and High-Power Lasers.- High-Energy Lasers.- Excimer Lasers for Microlithography.- Laser Beam Characterization.- Optical Coatings for Excimer Laser Applications.- Small Structures with Large Excimer Lasers.- Historical Review of Excimer Laser Development.- Applications.- Overview.- Ablation.- Micro-Machining.- Via Drilling.- Micro-Processing of Borosilicate Glass and Polymers.- F2-Laser Microfabrication for Photonics and Biophotonics.- Nano-Structuring with Femtosecond Excimer Laser Pulses.- Physical Aspects of Ultra-Fast UV Laser Transfer.- Microlithography.- TFT Annealing.- Fiber Bragg Gratings.- Marking.- Activation and Metallization of Dielectrics.- Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films.- Combustion Analysis.- Medical Applications of Excimer Lasers.- High-Intensity Applications of Excimer Lasers.- High-Repetition-Rate Applications of Excimer Lasers.- New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5 nm.- Trends in Worldwide Excimer Laser Sales.

From the reviews:

"This book is one of the few books devoted to excimer lasers and their applications. ... anyone working in the field of lasers or materials processing can take advantage of it. The editor has done the effort to include a list of abbreviations and also an alphabetic register, which enhances the usefulness of the book. The quality of printing and layout is perfect." (Erik Stijns, Physicalia, Vol. 28 (4-6), 2006)

Erscheint lt. Verlag 21.4.2005
Zusatzinfo XX, 433 p.
Verlagsort Berlin
Sprache englisch
Maße 155 x 235 mm
Gewicht 870 g
Themenwelt Naturwissenschaften Physik / Astronomie Optik
Technik Elektrotechnik / Energietechnik
Schlagworte Biophotonics • Design • Development • Excimer • Excimerlaser • Glass • Laser • Laser Physics • Laser technology • Material • Optics • Photonics • Physics • Technologie • Technology • Temperature • Trend
ISBN-10 3-540-20056-8 / 3540200568
ISBN-13 978-3-540-20056-7 / 9783540200567
Zustand Neuware
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