Optical Inspection of Microsystems

Buch | Softcover

532 Seiten

2019
CRC Press (Verlag)
978-0-367-39057-0 (ISBN)

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This book offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents state-of-the-art methods of optical analysis and enumerates their basic components.

Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands.

Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts.

Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

Osten, Wolfgang

Image Processing and Computer Vision for MEMS Testing. Image Correlation Techniques for Microsystems Inspection. Light Scattering Techniques for the Inspection of Microcomponents and Microstructures. Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM). Optical Profiling Techniques for MEMS Measurement. Grid and Moiré Methods for Micromeasurements. Grating Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents. Interference Microscopy Techniques for Microsystem Characterization. Measuring MEMS in Motion by Laser Doppler Vibrometry. An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-Of-Plane Deformations of MEMS and MOEMS. Optoelectronic Holography for Testing Electronic Packaging and MEMS. Digital Holography and Its Application in MEMS/MOEMS Inspection. Speckle Metrology for Microsystem Inspection. Spectroscopic Techniques for MEMS Inspection. Index.

Erscheinungsdatum	01.10.2019
Co-Autor	Angela Duparre, Cosme Furlong, Ingrid De Wolf
Mitarbeit	Herausgeber (Serie): Brian J. Thompson
Zusatzinfo	23 Tables, black and white; 230 Halftones, black and white; 479 Illustrations, black and white
Verlagsort	London
Sprache	englisch
Maße	178 x 254 mm
Gewicht	453 g
Themenwelt	Naturwissenschaften ► Physik / Astronomie ► Optik
	Technik ► Elektrotechnik / Energietechnik
	Technik ► Maschinenbau
	Technik ► Umwelttechnik / Biotechnologie
ISBN-10	0-367-39057-4 / 0367390574
ISBN-13	978-0-367-39057-0 / 9780367390570
Zustand	Neuware