Physics of Radiofrequency Capacitive Discharge
Seiten
2018
CRC Press (Verlag)
978-1-138-60080-5 (ISBN)
CRC Press (Verlag)
978-1-138-60080-5 (ISBN)
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.
V. P. Savinov
Foreword
Introduction
Abbreviations
1. Main physical properties and characteristics of radiofrequency capacitive discharge
2. Physical properties of near-electrode layers of space charge of RF capacitive discharge
3. Edge effects in the RF capacitive discharge
4. Near-electrode electron beams in RF capacitive discharge
5. Physical properties of RF gas discharge plasma
References
Index
| Erscheinungsdatum | 31.07.2018 |
|---|---|
| Zusatzinfo | 7 Tables, black and white; 179 Illustrations, black and white |
| Verlagsort | London |
| Sprache | englisch |
| Maße | 156 x 234 mm |
| Gewicht | 181 g |
| Themenwelt | Naturwissenschaften ► Physik / Astronomie ► Angewandte Physik |
| Naturwissenschaften ► Physik / Astronomie ► Plasmaphysik | |
| Technik ► Elektrotechnik / Energietechnik | |
| ISBN-10 | 1-138-60080-6 / 1138600806 |
| ISBN-13 | 978-1-138-60080-5 / 9781138600805 |
| Zustand | Neuware |
| Haben Sie eine Frage zum Produkt? |
Mehr entdecken
aus dem Bereich
aus dem Bereich
