Microfabrication for Industrial Applications

Regina Luttge (Autor)

Buch | Softcover

312 Seiten

2017
William Andrew Publishing (Verlag)
978-0-12-810367-8 (ISBN)

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Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.

Luttge studied Applied Sciences in Germany (1989-1993). She had been working as an engineering researcher at Institut für Mikrotechnik in Mainz, Germany, for nearly 5 years prior to starting her PhD studies in Microsystems Technologies at Imperial College in 1999, London, UK. In 2003, Luttge was awarded a PhD from University of London on the development of fabrication technology for micro-optical scanners. Switching her research interest to microfluidics applications, Luttge had been working for 12 years at University of Twente’s MESA+ Institute for Nanotechnology, The Netherlands, first as a senior scientist and since 2007 as an assistant professor prior to joining TU/e. Based on her established scientific profile in Nanoengineering for Medicine and Biology, Luttge has been appointed associate professor in the Microsystems Group at the Department of Mechanical Engineering in June 2013.

1. Microsystems technology2. Nanotechnology3. Microsystems for Information Technology4. Micro and nanomechanical sensors and actuators5. Sensors for chemical and medical applications6. Microfluidic systems7. Micro and nanotechnology for sustainable energy

Erscheinungsdatum	19.11.2017
Reihe/Serie	Micro & Nano Technologies
Verlagsort	Norwich
Sprache	englisch
Maße	191 x 234 mm
Gewicht	840 g
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Themenwelt	Technik ► Maschinenbau
ISBN-10	0-12-810367-1 / 0128103671
ISBN-13	978-0-12-810367-8 / 9780128103678
Zustand	Neuware