Nanofabrication

Principles and Applications

Christo Papadopoulos (Autor)

Buch | Softcover

VI, 81 Seiten

2016 | 1st ed. 2016
Springer International Publishing (Verlag)
978-3-319-31740-3 (ISBN)

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This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.

Introduction.- Silicon Planar Processing and Photolithography.- Direct-write Lithography Approaches.- Stamping Methods.- Scanning-probe Methods.- Natural Lithography.- Direct-Growth and Self-assembly.- Practical Examples and Case Studies of Nanofabrication.

Erscheinungsdatum	08.10.2016
Reihe/Serie	SpringerBriefs in Materials
Zusatzinfo	VI, 81 p. 41 illus., 31 illus. in color.
Verlagsort	Cham
Sprache	englisch
Maße	155 x 235 mm
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Themenwelt	Technik ► Maschinenbau
Schlagworte	Chemistry and Materials Science • Electronics and Microelectronics, Instrumentation • Emerging Self-assembly Approaches • Metallic nanoparticles • Nanofabrication Applications • Nanofabrication Applications in Biotechnology • Nanofabrication Applications in Nanoelectronics • Nanofabrication from Lithography • Nanofabrication Principles • Nanopatterning Introduction • Nanoscale Patterning • nanoscale science and technology • nanotechnology • self-assembly of nanostructures • semiconductors
ISBN-10	3-319-31740-7 / 3319317407
ISBN-13	978-3-319-31740-3 / 9783319317403
Zustand	Neuware