Buildings for Advanced Technology (eBook)

Ahmad Soueid, E. Clayton Teague, James Murday (Herausgeber)

eBook Download: PDF

2015 | 1st ed. 2015
XI, 185 Seiten
Springer International Publishing (Verlag)
978-3-319-24892-9 (ISBN)

Infos

This book deals with the design and construction of buildings for nanoscale science and engineering research. The information provided in this book is useful for designing and constructing buildings for such advanced technologies as nanotechnology, nanoelectronics and biotechnology. The book outlines the technology challenges unique to each of the building environmental challenges outlined below and provides best practices and examples of engineering approaches to address them:
• Establishing and maintaining critical environments: temperature, humidity, and pressure
• Structural vibration isolation
• Airborne vibration isolation (acoustic noise)
• Isolation of mechanical equipment-generated vibration/acoustic noise
• Cost-effective power conditioning
• Grounding facilities for low electrical interference
• Electromagnetic interference (EMI)/Radio frequency interference (RFI) isolation
• Airborne particulate contamination
• Airborne organic and chemical contamination
• Environment, safety and health (ESH) considerations
• Flexibility strategies for nanotechnology facilities
The authors are specialists and experts with knowledge and experience in the
control of environmental disturbances to buildings and experimental apparatus.

Ahmad Soueid is Principal/Senior Vice President for HDR Architecture, Inc. and chair of the Institute of Environmental Sciences and Technology (IEST) Nanotechnology Working Group which developed an overview document IEST-RP-NANO200, Planning of Nanoscale Science and Technology Facilities: Guidelines for Design, Construction, and Start-up.  He holds a BS and MS in Architecture from the University of Texas at Arlington.

Clayton Teague, now Guest Researcher at the U.S. National Institute of Standards and Technology (NIST), was Director of the U.S. National Nanotechnology Coordination Office (NNCO) from 2003 to 2011.  He also served as the Chair of the American National Standards Institute Technical Advisory Group to the ISO Technical Committee on Nanotechnologies (ISO TC 229) from 2005 - 2011.  He participated in the design/construction of the NIST Advanced Measurement.  He holds a BS and MS in physics from the Georgia Institute of Technology and a PhD in physics from the University of North Texas.

 

James Murday, now Director of Physical Sciences for the University of Southern California's Office of Research Advancement, was a founding member of the U.S. National Nanotechnology Initiative, and

executive secretary to the U.S. Nanoscale Science Engineering and Technology (NSET) Committee from 2001 to 2006.  He participated in the design/construction of the U.S. Naval Research Laboratory's Nanoscience Building.  He holds a BS in physics from the Case Institute of Technology and a PhD in physics from Cornell University.

Inhalt

Preface 6
Acknowledgments 10
Contents 12
Chapter 1: Introduction 13
Background 13
Chapter 2: Design Criteria 16
Introduction 16
Look for the New IEST Guidelines 17
Establishing Technical Requirements for a Building Project 17
Temperature and Humidity Control 19
Vibration Isolation 20
Airborne Contamination 22
EMI, RFI, and Electrical Power Conditioning 23
Planning for Facility Maintenance 24
Safety 24
Sustainability 25
Researchers Are People, Too! 26
Public Interface 27
Designing for the Unknown (the Future) 28
Conclusion 29
Bibliography 29
Chapter 3: Temperature and Humidity Control 31
Introduction 31
Environment Control for Instrumentation 32
Design Challenges 32
Temperature 32
Air Filtration 33
Humidity 33
Air Management 34
Control System 34
Vibration Controls 35
Energy Efficiency 36
Integration of the Manifold Requirements 37
General Laboratories 37
High Accuracy Laboratories 39
System Components 41
Bibliography 44
Chapter 4: Vibration Isolation 45
Introduction 45
Considerations for Vibration and Acoustic Noise 46
Vibration 46
Acoustics 48
Site Evaluation and Selection 48
Vibration 48
Acoustics 49
Design Considerations 50
Facility Concept and Layout 50
Foundation 50
Slab on Grade (NIST Type-A) 51
Slab Supported by Air Springs (NIST Type-A1) 56
Architectural and Structural Issues 57
Interior Walls 57
Interior Sources of Vibration and Noise 58
Mechanical Systems 58
Control of Vibration from Mechanical Systems 60
Control of Vibration from Electrical Systems 62
Bibliography 62
Chapter 5: Acoustic Noise 64
Introduction 64
Acoustics Terminology Review 65
Pressure Versus Power, Decibels 65
Types of Noise 65
Noise Criteria 71
Impact of Noise on Research and Process Equipment 72
Mechanisms by Which Acoustic Noise Interferes with Equipment 73
Laboratory Noise Sources and Control 76
Noise Control 77
Bibliography 78
Chapter 6: Disturbances due to Building Mechanical Systems 79
Introduction 79
Examples 80
Electron Microscope Operation and Noise Levels 80
Flow at Fan Inlets 80
Swirling Air at Inlet to Vane Axial Fan 81
Sudden Change in Duct Size 82
Large Induced Draft Fan Noise Impacts on the Neighboring Residential Community 84
Chapter 7: Electric Power Grounding and Conditioning 86
Grounding 86
Basic Grounding Requirements for Every Facility 88
Stray Power Currents in Building Conductors 88
Power Line Filters 89
A Few Common Misconceptions 89
Grounding Provides a Path for Return Current Flow So That It Does Not Flow in Sensitive Circuits 89
Unwanted Current That Flows Through Building Steel or Through a Conduit Is Not a Problem 89
A Circuit of Ground Conductors Can Limit Interference in a Facility 89
The Equipment Designer and the Facility 90
Power Feeds: The Isolation Transformer 90
Magnetic Field Control 90
Methodology in Reducing Electrical Interference in Facility Design 91
Note on Ground Planes 92
Voltage Stability 92
The SEMI F47 Voltage Sag Standard 92
Control-Level Approach 93
The Voltage Dip Proofing Inverter 94
Constant Voltage Transformer 94
Uninterruptible Power Supply 96
The Dynamic Sag Corrector 97
Coil Hold-In Devices 97
Bibliography 98
Chapter 8: EMI/RFI: Electromagnetic and Radio-Frequency Interference 99
Introduction 99
Electromagnetic Spectrum 100
Recommended AC ELF and DC EMI and RFI Performance Requirements 101
DC Electromagnetic Interference 103
Recommended RFI Thresholds 104
Defining Ambient EMI/RFI Emission Levels: The Site Survey 104
Ground and Net Current Issues 105
Schematic Design EMI/RFI Assessment Methods 108
PVC, EMT, and RGS Conduit EMI Simulations and Comparisons 108
Switchgear Simulation and Shielding 110
Elevator DC EMI Issues and Shielding 110
Predicted NMR DC EMI Emission Profiles, Magnetic Shielding and Active-Field Cancellation 112
Near Zero-Milligauss AC ELF Magnetic Shielding Systems for EMI Sensitive Tools 116
Near Zero-Milligauss AC ELF Magnetic Shielding System Options 118
Final Full-Spectrum EMI/RFI Commissioning 118
Bibliography 119
Chapter 9: Airborne Contamination 121
Introduction 121
Cleanroom Design 123
Bibliography 126
Chapter 10: Bio-containment 127
Introduction 127
Design Challenges 128
Similar Space Organization 128
Similar Construction 128
Ventilation Requirements 129
Nanotechnology Cleanroom 129
Biocontainment Facility 129
Space Outfitting 130
Furnishings, Finishes, Fine Details 130
Colocated Cleanroom/Bio-containment 131
Bibliography 133
Chapter 11: Case Studies and Building Statistics 134
Part A: Case Studies 134
Introduction 134
Case Study 1: NIST Advanced Measurement Laboratory 135
Introduction 135
AML Design 136
Project Site 136
Building Layout 136
Organization and Design 137
Image 138
Critical Design Criteria 138
Vibration Isolation 139
Temperature and Humidity Control 140
Clean Electrical Power 140
Particulate Control 141
State-of-the-Art Laboratories 141
The Nanofabrication Facility 142
Instrument Labs East and West 142
Metrology Labs East and West 142
NIST: A Vibration Criteria 143
Case Study 2: The National Institute for Nanotechnology, The University of Alberta 145
Introduction 145
NINT Project Summary 145
Personnel and Facilities 145
Program Summary (Table11.2) 146
Research Program 146
NINT Phase 1 Project Summary 147
Case Study 3: Oak Ridge National Laboratory Advanced Microscopy Laboratory 147
Case Study 4: Generic Analytical Instrumentation Facility 150
Introduction 150
General 150
Special 151
Acoustic Noise 151
Mechanical Vibrations 151
Electromagnetic Interference 152
Environmental Changes 153
Remote Instrument Operation 154
Case Study 5: Generic 300mm Wafer Fabrication Facility 154
Introduction 154
Wafer Fabrication Facilities 154
What Types of Contamination Are of Concern? 155
Part B: Building Statistics 159
Introduction 159
Birck Nanotechnology Center 160
Purdue University, West Lafayette, IN 160
National Institute for Nanotechnology 161
University of Alberta, Edmonton, Canada 161
Naval Research Laboratory Nanoscience Building 162
NRL, Washington, DC 162
Center for Integrated Nanotechnologies 164
Sandia National Laboratories, Albuquerque, NM Los Alamos National Laboratory, Los Alamos, NM
Molecular Foundry 166
Lawrence Berkeley National Laboratory, Berkeley, CA 166
Advanced Measurement Laboratory 167
National Institute of Standards and Technology, Gaithersburg, MD 167
National Institute of Standards and Technology, Advanced Measurement Laboratory 169
Facts and Figures 169
Architectural 169
Class 100 Cleanroom Facility 169
Structural 169
Electrical 169
Mechanical 170
Plumbing 170
Fire Protection 170
Appendix A. Workshop Agendas 171
Appendix B. Participants and Contributors 178
Index 184

Produkt-Details

• Erscheint lt. Verlag: 30.12.2015
• Reihe/Serie: Science Policy Reports
• Reihe/Serie: Science Policy Reports
• Zusatzinfo: XI, 185 p. 62 illus., 58 illus. in color.
• Verlagsort: Cham
• Sprache: englisch
• Themenwelt: Technik
• Schlagworte: Acoustic Noise Isolation • Building Design • Critical Environments for Labs • Engineering of Building System • Low Electrical Interference • Nanotechnology Facilities • noise control • Organic and Chemical Contamination • Power Conditioning • Structural Vibration Isolation
• ISBN-10: 3-319-24892-8 / 3319248928
• ISBN-13: 978-3-319-24892-9 / 9783319248929