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Temperature Measurement during Millisecond Annealing

Ripple Pyrometry for Flash Lamp Annealers

Denise Reichel (Autor)

Buch | Softcover

XXV, 112 Seiten

2016 | 1st ed. 2015
Springer Fachmedien Wiesbaden GmbH (Verlag)
978-3-658-11387-2 (ISBN)

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Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method's suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

Dr. Denise Reichel currently works in technical sales and consulting for temperature measurement needs and as a lecturer for thermodynamics and heat and mass transfer.

Introduction and motivation.- Fundamentals of flash lamp annealing of shallow Boron-doped Silicon.- Fundamentals of surface temperature measurements during flash lamp annealing.- Concept of ripple pyrometry during flash lamp annealing.- Ripple pyrometry for flash lamp annealing.- Experiments - ripple pyrometry during flash lamp annealing.- Closing discussion and outlook.

Erscheinungsdatum	08.10.2016
Reihe/Serie	MatWerk
Zusatzinfo	XXV, 112 p. 77 illus. in color.
Verlagsort	Wiesbaden
Sprache	englisch
Maße	148 x 210 mm
Themenwelt	Naturwissenschaften ► Chemie ► Analytische Chemie
	Naturwissenschaften ► Physik / Astronomie ► Atom- / Kern- / Molekularphysik
	Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik
	Naturwissenschaften ► Physik / Astronomie ► Thermodynamik
	Technik ► Maschinenbau
Schlagworte	Biomedical and Life Sciences • emissivity • Flash Lamp Annealing • lamp-based annealing of semiconductors • materials engineering • mechanical oscillator • semiconductors • Solid state physics • thermodynamics • voice coil
ISBN-10	3-658-11387-1 / 3658113871
ISBN-13	978-3-658-11387-2 / 9783658113872
Zustand	Neuware