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Introductory MEMS - Thomas M. Adams, Richard A. Layton

Introductory MEMS

Fabrication and Applications
Buch | Softcover
440 Seiten
2014
Springer-Verlag New York Inc.
978-1-4899-8421-0 (ISBN)
CHF 119,80 inkl. MwSt
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Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.


Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

Fabrication.- The substrate and adding material to it.- Creating and transferring patterns#x2014;Photolithography.- Creating structures#x2014;Micromachining.- Solid mechanics.- Applications.- Thinking about modeling.- MEMS transducers#x2014;An overview of how they work.- Piezoresistive transducers.- Capacitive transducers.- Piezoelectric transducers.- Thermal transducers.- to microfluidics.- Laboratories.- Microfabrication laboratories.

Erscheint lt. Verlag 7.9.2014
Zusatzinfo XV, 440 p.
Verlagsort New York
Sprache englisch
Maße 155 x 235 mm
Themenwelt Naturwissenschaften Physik / Astronomie Mechanik
Technik Elektrotechnik / Energietechnik
Technik Maschinenbau
ISBN-10 1-4899-8421-6 / 1489984216
ISBN-13 978-1-4899-8421-0 / 9781489984210
Zustand Neuware
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