Low-Pressure Synthetic Diamond

Manufacturing and Applications

Bernhard Dischler, Christoph Wild (Herausgeber)

Buch | Softcover

XI, 384 Seiten

2013 | 1. Softcover reprint of the original 1st ed. 1998
Springer Berlin (Verlag)
978-3-642-71994-3 (ISBN)

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The advent of low-pressure synthesis techniques for the chemical vapour deposition (CVD) of diamond has opened up a new and fascinating field of research and development. The preparation of diamond in the shape of thin films or extended wafers has enabled a variety of new applications, including optical windows, heat spreaders for thermal management, durable cutting tools, and a variety of sensors. Great effort has been made to develop new and efficient methods of economic low-pressure diamond deposition. This book responds to the worldwide interest with a comprehensive presentation of the complete spectrum of methods for CVD-diamond deposition and an overview of the most important applications.

The book provides a comprehensive overview of the manufacturing and applications of low-pressure synthetic diamond. The most relevant deposition techniques and applications of CVD diamond are reviewed. Emphasis is put on practical aspects and future prospects. This book will be useful for newcomers as well as scientists and engineers who are already familiar with this field.

I Introduction.- 1. CVD Diamond: A New and Promising Material.- II Methods of CVD-Diamond Production.- 2. Microwave-Plasma Deposition of Diamond.- 3. Combustion Flame Deposition of Diamond.- 4. Plasma-Jet Deposition of Diamond.- 5. Hot-Filament Deposition of Diamond.- 6. Low-Temperature Diamond Deposition.- 7. Other CVD Methods for Diamond Production.- 8. Heteroepitaxy and Highly Oriented Diamond Deposition.- III Applications of CVD Diamond.- 9. Thermal Properties and Applications of CVD Diamond.- 10. CVD Diamond for Optical Windows.- 11. CVD Diamond for X-ray Windows and Lithography Mask Membranes.- 12. CVD Diamond for Cutting Tools.- 13. CVD-Diamond Sensors for Temperature and Pressure.- 14. CVD Diamond for Surface Acoustic Wave Filters.- 15. Electron Emission from CVD-Diamond Cold Cathodes.- 16. CVD Diamond for Ultraviolet and Particle Detectors.- 17. Electronic Devices on CVD Diamond.- IV Outlook.- 18. CVD Diamond in the 21st Century.

Erscheint lt. Verlag	13.11.2013
Reihe/Serie	Springer Series in Materials Processing
Zusatzinfo	XI, 384 p. 106 illus.
Verlagsort	Berlin
Sprache	englisch
Maße	155 x 235 mm
Gewicht	560 g
Themenwelt	Naturwissenschaften ► Physik / Astronomie ► Atom- / Kern- / Molekularphysik
	Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik
	Technik ► Maschinenbau
Schlagworte	CVD Diamond • deposition of thin layers • electronic material • low pressure methods • optical components • Sensor • sensors • Surface films • Temperature • X-Ray
ISBN-10	3-642-71994-5 / 3642719945
ISBN-13	978-3-642-71994-3 / 9783642719943
Zustand	Neuware