Film Deposition by Plasma Techniques

Mitsuharu Konuma (Autor)

Buch | Softcover

X, 224 Seiten

2011 | 1. Softcover reprint of the original 1st ed. 1992
Springer Berlin (Verlag)
978-3-642-84513-0 (ISBN)

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Properties of thin films depend strongly upon the deposition technique and conditions chosen. In order to achieve the desired film, optimum deposition conditions have to be found by carrying out experiments in a trial-and error fashion with varying parameters. The data obtained on one growth apparatus are often not transferable to another. This is especially true for film deposition processes using a cold plasma because of our poor under standing of the mechanisms. Relatively precise studies have been carried out on the role that physical effects play in film formation such as sputter deposition. However, there are many open questions regarding processes that involve chemical reactions, for example, reactive sputter deposition or plasma enhanced chemical vapor deposition. Much further research is re quired in order to understand the fundamental deposition processes. A sys tematic collection of basic data, some of which may be readily available in other branches of science, for example, reaction cross sections for gases with energetic electrons, is also required. The need for pfasma deposition techniques is felt strongly in industrial applications because these techniques are superior to traditional thin-film deposition techniques in many ways. In fact, plasma deposition techniques have developed rapidly in the semiconductor and electronics industries. Fields of possible application are still expanding. A reliable plasma reactor with an adequate in situ system for monitoring the deposition conditions and film properties must be developed to improve reproducibility and pro ductivity at the industrial level.

Plasma deposition techniques are of major importance because they can be used to produce high-quality thin films for applications in device technology. This introduction to the subject contains sufficient details of the foundations of plasma science to be useful to newcomers to the field and, at the same time, ample information about specific techniques and new results, so that established researchers will also find it of interest.

1. The Plasma State.- 1.1 Characterization of Plasma.- 1.2 Classification of Plasma.- 2. Reactions in Plasmas.- 2.1 Collision Phenomena.- 2.2 Excitation and Ionization.- 2.3 Recombination.- 2.4 Ion-Molecule Reactions and Reactions Involving Negative Ions.- 2.5 Transport Phenomena.- 3. Generation of Cold Plasma.- 3.1 Electrical Breakdown and Starting Voltage.- 3.2 Glow Discharge.- 3.3 High-Frequency Discharge.- 3.4 Microwave Discharge.- 4. Plasma Diagnostics.- 4.1 Optical Spectroscopy.- 4.2 Probes.- 4.3 Particle Measurements.- 4.4 Others.- 5. Cold Plasma and Thin Film Formation.- 5.1 Interactions of Cold Plasma with Solid Surfaces.- 5.2 Application of Cold Plasma to Thin Film Deposition.- 6. Physical Vapor Deposition Under Plasma Conditions.- 6.1 Sputter Deposition.- 6.2 Ion Plating.- 7. Chemical Vapor Deposition Under Plasma Conditions.- 7.1 Plasma-Enhanced Chemical Vapor Deposition.- 7.2 Plasma Polymerization.- 7.3 Other Techniques.- 8. Surface Modification by Cold Plasma.- 8.1 Surface Treatment for Metals and Semiconductors.- 8.2 Modification of Polymer Surfaces.- References.- Further Reading.

Erscheint lt. Verlag	15.12.2011
Reihe/Serie	Springer Series on Atomic, Optical, and Plasma Physics
Zusatzinfo	X, 224 p.
Verlagsort	Berlin
Sprache	englisch
Maße	155 x 235 mm
Gewicht	370 g
Themenwelt	Naturwissenschaften ► Physik / Astronomie ► Atom- / Kern- / Molekularphysik
	Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik
	Naturwissenschaften ► Physik / Astronomie ► Plasmaphysik
	Naturwissenschaften ► Physik / Astronomie ► Thermodynamik
	Technik
Schlagworte	Collision • cross section • Design • elastic collision • Halbleiterbauelement • Hydrogen • Material • mechanisms • Molecule • negative ions • particles • Physical vapor deposition • Plasma • plasma enhenced CVD • Plasmaphysik • plasma surface treatment • Plasma technology • Polymer • Science • semiconductor • Technology • Thin Film Formation
ISBN-10	3-642-84513-4 / 3642845134
ISBN-13	978-3-642-84513-0 / 9783642845130
Zustand	Neuware