Semiconductor Industrial Hygiene Handbook

Monitoring, Ventiliation, Equipment and Ergonomics

David G. Baldwin, Paul C. Manz, Michael E. Williams (Autoren)

Buch | Hardcover

363 Seiten

1995
William Andrew Publishing (Verlag)
978-0-8155-1369-8 (ISBN)

Titel ist leider vergriffen;
keine Neuauflage

Artikel merken

Offers a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. This book contains chapters on industrial hygiene concerns that are not specific to the semiconductor industry.

This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.

IntroductionIndustrial Hygiene MonitoringIndustrial Hygiene Monitoring: Physical AgentsVentilationPersonal Protective Equipment (PPE)Indoor Air Quality (IAQ)ErgonomicsIndustrial Hygiene RecordkeepingPlan ReviewAppendix A: Silicon Ingot and Wafer ManufacturingAppendix B: Silicon Device Manufacturing IntroductionAppendix C: III-V (GaAs)Appendix D: III-V Device: Microwave ICAppendix E: Ion Implanter Maintenance Safety ConsiderationsAppendix F: BibliographyGlossary and AcronymsIndex

Erscheint lt. Verlag	31.12.1995
Verlagsort	Norwich
Sprache	englisch
Maße	152 x 229 mm
Gewicht	680 g
Themenwelt	Technik ► Elektrotechnik / Energietechnik
ISBN-10	0-8155-1369-0 / 0815513690
ISBN-13	978-0-8155-1369-8 / 9780815513698
Zustand	Neuware