Design of a Monolithic 3DOF MEMS Capacitive Accelerometer
Utilizing Surface Micromachining Technology Using PolyMUMPS Process
Seiten
2011
LAP Lambert Acad. Publ. (Verlag)
978-3-8454-0952-8 (ISBN)
LAP Lambert Acad. Publ. (Verlag)
978-3-8454-0952-8 (ISBN)
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Sensors and devices, based on micromachining technology, known as micro-electro-mechanicalsystems or MEMS, have been received increasing attention so far in recent years. Micromachined inertial sensors, consisting of accelerometers and gyroscopes, are one of the most important types of silicon-based sensor. MEMS capacitive accelerometers have been extensively used in automobiles, inertial navigation systems, earth quake detection and many other bio-medical applications. This book deals with the design of a monolithic 3DOF MEMS capacitive accelerometer using both analytical and numerical techniques. Monolithic accelerometer is a single structure having three individual single axis Accelerometers on a single substrate and utilizes a surface micromachining technology using standard PolyMUMPs process. The designed accelerometer is 3mm×3.1mm in size, has low mechanical noise floor, high sense capacitance and high sensitivity along in-plane (x and y) and out-of-plane (z) axes. Performing a detailed finite element analysis in ANSYS 11.o, physical level simulation has been done to verify the deflection for x, y and z axes with respect to the applied acceleration (g).
| Verlagsort | Colne |
|---|---|
| Sprache | englisch |
| Maße | 150 x 220 mm |
| Gewicht | 153 g |
| Themenwelt | Technik ► Elektrotechnik / Energietechnik |
| ISBN-10 | 3-8454-0952-5 / 3845409525 |
| ISBN-13 | 978-3-8454-0952-8 / 9783845409528 |
| Zustand | Neuware |
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Buch | Hardcover (2024)
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