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Industrial Plasma Engineering - J Reece Roth

Industrial Plasma Engineering

Volume 2: Applications to Nonthermal Plasma Processing

(Autor)

Buch | Hardcover
658 Seiten
2001
Institute of Physics Publishing (Verlag)
978-0-7503-0544-0 (ISBN)
CHF 418,95 inkl. MwSt
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Written by a leading expert in the field, Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low-temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices tha
Written by a leading expert in the field, Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices that are of commercial interest. The text is suitable for students or in-service users with a physics and calculus background at the sophomore level. These two volumes are intended to be used as textbooks at the senior or first-year graduate level by students from all engineering and physical science disciplines and as a reference source by in-service engineers.

J Reece Roth Department of Electrical and Computer Engineering University of Tennessee, Knoxville

Surface Interactions in Plasma Processing. Atmospheric Pressure Plasma Sources. Vacuum Plasma Sources. Plasma Reactors for Plasma Processing. Specialized Techniques and Devices for Plasma Processing. Parametric Plasma Effects on Plasma Processing. Diagnostics for Plasma Processing. Plasma Treatment of Surfaces. Surface Modification by Implantation and Diffusion. Thin Film Deposition by Evaporative Condensation and Sputtering. Plasma Chemical Vapor Deposition (PCVD). Plasma Etching.

Erscheint lt. Verlag 25.8.2001
Verlagsort London
Sprache englisch
Maße 156 x 234 mm
Gewicht 1247 g
Themenwelt Naturwissenschaften Physik / Astronomie Plasmaphysik
Technik Maschinenbau
ISBN-10 0-7503-0544-4 / 0750305444
ISBN-13 978-0-7503-0544-0 / 9780750305440
Zustand Neuware
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