Fundamental Principles of Engineering Nanometrology

Richard Leach (Autor)

Buch | Hardcover

352 Seiten

2009
William Andrew (Verlag)
978-0-08-096454-6 (ISBN)

Infos

Presents the principles of engineering metrology applied to the micro- and nanoscale suitable for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. This work also covers basic metrological terminology, and the important topic of measurement uncertainty.

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Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

Autor

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

Inhalt

1. Introduction to metrology for micro- and nanotechnology
2. Some basics of measurement
3. Precision measurement instrumentation - some design principles
4. Length traceability using interferometry
5. Displacement measurement
6. Surface topography measurement instrumentation
7. Scanning probe and particle beam microscopy
8. Surface topography characterisation
9. Co-ordinate metrology
10. Mass and force measurement
References
Appendix A SI units of measurement and their realisation at NPL
Appendix B SI derived units

Produkt-Details

• Erscheint lt. Verlag: 16.11.2009
• Reihe/Serie: Micro & Nano Technologies
• Verlagsort: Oxford
• Sprache: englisch
• Maße: 191 x 235 mm
• Gewicht: 880 g
• Themenwelt: Technik
• ISBN-10: 0-08-096454-0 / 0080964540
• ISBN-13: 978-0-08-096454-6 / 9780080964546
• Zustand: Neuware