X-ray Scattering from thin films
Springer Berlin (Hersteller)
978-3-540-62029-7 (ISBN)
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This critical overview presents experimental methods for solving most frequent structural problems of mono-crystalline thin films and layered systems, including thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is intended as a reference for experimentalists who want to improve their knowledge on modern X-ray methods for thin film analysis.
Part 1 Experimental realization: basic elements of an equipment; resolution elements; diffractometers and reflectometers. Part 2 The theory of X-ray diffraction and its realization by the experiment: kinematical X-ray scattering from ideal crystals; kinematical X-ray diffraction from deformed thin layers; kinematical X-ray diffraction from randomly disturbed layers; dynamical X-ray diffraction in perfect layers; dynamical X-ray diffraction in slightly deformed layers; optical reflection of X-rays from ideal layers; optical reflection of X-rays from layers with rough interfaces; dynamical X-ray diffraction in strongly asymmetric cases; grazing incidence diffraction (GID). Appendices: elements of the formal theory of scattering; structure factors, dispersion corrections and extinction length.
Zusatzinfo | 100 figs. |
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Verlagsort | Berlin |
Sprache | englisch |
Einbandart | gebunden |
Themenwelt | Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik |
Naturwissenschaften ► Physik / Astronomie ► Optik | |
ISBN-10 | 3-540-62029-X / 354062029X |
ISBN-13 | 978-3-540-62029-7 / 9783540620297 |
Zustand | Neuware |
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