Analysis and Design Principles of MEMS Devices
Seiten
2005
Elsevier Science Ltd (Verlag)
978-0-444-51616-9 (ISBN)
Elsevier Science Ltd (Verlag)
978-0-444-51616-9 (ISBN)
Sensors and actuators are part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. This book presents the analysis and design principles of MEMS devices.
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.
Chapter 1. Introduction to MEMS devices
Chapter 2. Basic mechanics of beam and diaphragm structures
Chapter 3. Air Damping
Chapter 4. Electrostatic Actuation
Chapter 5. Capacitive Sensing and Effects of Electrical Excitation
Chapter 6. Piezoresistive Sensing
| Erscheint lt. Verlag | 12.4.2005 |
|---|---|
| Verlagsort | Oxford |
| Sprache | englisch |
| Maße | 165 x 240 mm |
| Gewicht | 760 g |
| Themenwelt | Naturwissenschaften ► Chemie |
| ISBN-10 | 0-444-51616-6 / 0444516166 |
| ISBN-13 | 978-0-444-51616-9 / 9780444516169 |
| Zustand | Neuware |
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