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Analysis and Design Principles of MEMS Devices - Minhang Bao

Analysis and Design Principles of MEMS Devices

(Autor)

Buch | Hardcover
328 Seiten
2005
Elsevier Science Ltd (Verlag)
978-0-444-51616-9 (ISBN)
CHF 159,95 inkl. MwSt
Sensors and actuators are part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. This book presents the analysis and design principles of MEMS devices.
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.

Chapter 1. Introduction to MEMS devices

Chapter 2. Basic mechanics of beam and diaphragm structures

Chapter 3. Air Damping

Chapter 4. Electrostatic Actuation

Chapter 5. Capacitive Sensing and Effects of Electrical Excitation

Chapter 6. Piezoresistive Sensing

Erscheint lt. Verlag 12.4.2005
Verlagsort Oxford
Sprache englisch
Maße 165 x 240 mm
Gewicht 760 g
Themenwelt Naturwissenschaften Chemie
ISBN-10 0-444-51616-6 / 0444516166
ISBN-13 978-0-444-51616-9 / 9780444516169
Zustand Neuware
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