Plasma Surface Engineering
Proceedings of the Second International Conference (PSE, 90), Garmisch-Partenkirchen, Germany, 10-14 September 1990
Seiten
1991
Elsevier Science Ltd (Verlag)
978-0-444-89279-9 (ISBN)
Elsevier Science Ltd (Verlag)
978-0-444-89279-9 (ISBN)
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Devoted to the basic research and industrial applications of the plasma and ion assisted surface modification and coatings, this book presents an up-to-date review of the recent research and developments in this field. The object of the conference was to provide a link between those devoted to basic research and the widespread and expanding applications of surface and thin film technology. The resulting proceedings provide a useful reference for further developments in plasma and particle beam assisted surface and thin film technology.
Preface. Plasma Diagnostics. Biocompatible Materials. Plasma Assisted Chemical Vapour Deposition. Erosion and Corrosion. Polymers. Process Control. Ion Beam Technology - Modification and Mixing. Ion Beam Assisted Deposition. Thin Film Characterization. Sputtering. Electron Cyclotron Resonance. Amorphous Semiconducting Films. Substrate Treatment. Electrical Applications. Microelectronic Applications.
| Verlagsort | Oxford |
|---|---|
| Sprache | englisch |
| Themenwelt | Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik |
| Naturwissenschaften ► Physik / Astronomie ► Plasmaphysik | |
| Technik ► Maschinenbau | |
| ISBN-10 | 0-444-89279-6 / 0444892796 |
| ISBN-13 | 978-0-444-89279-9 / 9780444892799 |
| Zustand | Neuware |
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