Blick ins Buch

Model-based examination of dust particle contamination in plasma coating processes

Paul Philipp Schulz (Autor)

Buch | Softcover

148 Seiten

2023
Fraunhofer Verlag
978-3-8396-1886-8 (ISBN)

Lese- und Medienproben

Inhaltsverzeichnis (PDF)

Artikel merken

This work describes the foundation to the microparticle simulation code PALADIN (PlasmA LAttice Dust INtegrator), mainly designed for studying microparticle contamination in arbitrary geometries. The theoretical foundation for PALADIN is derived in a detailed way by calculating various moments of the Maxwell-Boltzmann distribution in a plasma, leading to expressions for forces and currents acting on the microparticles. Then, the general functionality of PALADIN is discussed, with some specific examples presented to show the functionality of PALADIN, ranging from a simple box to more complicated geometries. Finally, the EOSS, a magnetron sputter coater, is used as a specific scenario to study the influence of microparticles on optical coatings.

Erscheinungsdatum	03.02.2023
Reihe/Serie	Advances in surface engineering and sustainable production ; 1
Zusatzinfo	num., mostly col. illus. and tab.
Verlagsort	Stuttgart
Sprache	englisch
Maße	148 x 210 mm
Themenwelt	Naturwissenschaften ► Physik / Astronomie ► Plasmaphysik
Schlagworte	B • Computer Modelling • computer simulation • Plasma physics • Surface-coating technology • Verfahrensingenieure, Physiker
ISBN-10	3-8396-1886-X / 383961886X
ISBN-13	978-3-8396-1886-8 / 9783839618868
Zustand	Neuware