Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 1

Introduction to Vacuum and Systems

J.R. Gaines, Matthew Healy (Autoren)

Buch | Softcover

550 Seiten

2024
Elsevier Science Publishing Co Inc (Verlag)
978-0-12-823392-4 (ISBN)

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Fundamentals of Vacuum Science and System Design for High and Ultra-High Vacuum, Volume 1: Introduction to Vacuum and Systems details the important practical considerations in design of vacuum systems for various vacuum deposition technologies. Topics covered include: Introduction to vaccum and end uses, molecular density in vacuum, molecular flow in various vacuum regimes, characteristics of gas composition at various molecular densities, general principles of gas-solid interactions, vacuum pump technology, pressure sensors, leak detection and the impact of fundamental design decisions and operating practices on vacuum system performance. The introductory sections are designed to introduce the reader to basic concepts in vacuum technology. More detailed sections provide fundamental descriptions of basic vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach. System design, assembly, maintenance, and trouble-shooting are reviewed in detail. This volume also describes a wide range of pressure measurement approaches, and includes several key characterization techniques, example applications on systems for rough vacuum, high vacuum and ultra-high vacuum, as well as trade-offs in system design, allowing for the reader to develop an understanding of all the elements required for a successfully designed, assembled, and operating system.

J.R. Gaines is the Technical Director of Education for the Kurt J. Lesker Company, Jefferson Hills PA, United States. He has more than 40 years of experience in the research, development, and commercialization of advanced materials technologies including superconductivity, semiconductors, cryogenics, space simulation, energy generation, and energy conversion and storage. His experience includes vacuum systems, thin-film deposition, inorganic chemistry, nanotechnology, and advanced ceramic processing. He currently develops and delivers Lesker’s many educational programs through Lesker University teaching events. Matt Healy is Business Segment Manager at Kurt J. Lesker Company, Jefferson Hills PA, United States, specializing in materials processing and applications. He has a PhD in Chemistry from Harvard University, a BS in Chemistry from the Massachusetts Institute of Technology, and an MBA from University of Chicago Graduate School of Business. He began his research career as a post-doctoral scientist at the Department of Energy’s Los Alamos National Laboratory. He was formerly Vice President of Product Management at Pixelligent Technologies, LLC and previously Director of Business Development of Digital Lumens and GE Lighting Division, and Product Line Director at ATMI.

About the authors

Acknowledgments

Chapter 1: 2500 years of vacuum science and technology

Chapter 2: Understanding pressure and vacuum

Chapter 3: Overview of vacuum systems

Chapter 4: Examples of vacuum systems

Chapter 5: The movement of gases in vacuum systems

Chapter 6: Understanding unwanted gases in vacuum systems

Symbols used in vacuum system design

Fundamentals of Vacuum Science Glossary

Index

Erscheinungsdatum	22.08.2024
Reihe/Serie	Vacuum and Thin-Film Deposition Technologies
Sprache	englisch
Maße	152 x 229 mm
Themenwelt	Naturwissenschaften ► Physik / Astronomie
Themenwelt	Technik ► Maschinenbau
ISBN-10	0-12-823392-3 / 0128233923
ISBN-13	978-0-12-823392-4 / 9780128233924
Zustand	Neuware