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Photonic Waveguide Components on Silicon Substrate - Swagata Samanta, Pallab Banerji, Pranabendu Ganguly

Photonic Waveguide Components on Silicon Substrate (eBook)

Modeling and Experiments
eBook Download: PDF
2019 | 1st ed. 2020
XVII, 100 Seiten
Springer Singapore (Verlag)
978-981-15-1311-4 (ISBN)
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This book focuses on the design and development of SU-8 polymer and silicon waveguide-based devices using the effective index based matrix method. Various fabrication techniques like laser direct writing (LDW), Focused Ion Beam (FIB) and optical lithography are discussed. FIB lithography has been explored for photonic-crystal structures on the waveguide and for directional coupler in coupled region. This technique is shown to be suitable in fabricating photonic crystal structures as well as for making any precise modifications in micro- and nano-meter photonic waveguide structures. This book can be a useful reference for students, researchers, and fabrication engineers working in the areas of integrated optics, optical communications, laser technology and optical lithography for device manufacturing. 



Dr. Swagata Samanta received her Ph.D from the Advanced Technology Development Centre (ATDC), Indian Institute of Technology Kharagpur (IIT-KGP) in 2018. She continued her research as a postdoctoral fellow at the Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc) Bangalore. Presently, she is a postdoctoral research assistant in the School of Engineering, University of Glasgow, Scotland, UK. Her research interests include novel on-chip nanophotonic and nanoelectronic devices, integrated optics, VLSI systems, image processing, and artificial intelligence.

Dr. Pallab Banerji obtained his Ph.D from Jadavpur University, Kolkata, India. Presently, he is serving as a Professor and Head of the Materials Science Centre, Indian Institute of Technology Kharagpur. His major research areas are low dimensional semiconductors: structures and devices, photonics, thermoelectrics, and compound semiconductors. He has published about 120 research papers in international journals and guided more than 15 doctoral students.

Dr. Pranabendu Ganguly received his Ph.D in 2000 from the Indian Institute of Technology Kharagpur in integrated optics. Currently, he is working as senior scientific officer at the Advanced Technology Development Centre (ATDC), IIT Kharagpur. His recent areas of interest include micro- and nano-photonic devices, and guided wave optics. Dr. Ganguly has published 95 research papers in national and international journals, and conference proceedings. He is a Fellow of the Optical Society of India.


This book focuses on the design and development of SU-8 polymer and silicon waveguide-based devices using the effective index based matrix method. Various fabrication techniques like laser direct writing (LDW), Focused Ion Beam (FIB) and optical lithography are discussed. FIB lithography has been explored for photonic-crystal structures on the waveguide and for directional coupler in coupled region. This technique is shown to be suitable in fabricating photonic crystal structures as well as for making any precise modifications in micro- and nano-meter photonic waveguide structures. This book can be a useful reference for students, researchers, and fabrication engineers working in the areas of integrated optics, optical communications, laser technology and optical lithography for device manufacturing. 

Preface 7
Contents 8
About the Authors 10
Abbreviations 11
Symbols 13
1 Introduction to Waveguides 16
1.1 Fundamentals and Background 16
1.1.1 Rib and Wire Waveguides 18
1.1.2 Micro-ring Resonator 19
1.1.3 Photonic Crystal Structure 20
1.1.4 Power Splitter 21
1.2 Motivation and Objectives 22
1.3 Outline of the Book 23
References 23
2 Theoretical Studies on Silicon and SU-8 Waveguides 27
2.1 Introduction 27
2.2 Design of Single-Mode Wire Waveguide 27
2.3 Bending Loss Computation of Bent Wire 34
2.4 Lateral Mode Profile Computation of Photonic Wire 35
2.5 Design Aspects of Wire Waveguide with Slanted Wall 35
2.6 Design of Large Cross-Section Silicon Rib Waveguide 36
2.7 Computed Results 37
2.8 Conclusions 45
References 46
3 Experimental Studies on SU-8 Wire Waveguides 47
3.1 Introduction 47
3.2 Fabrication and Characterization 48
3.2.1 Fabrication by Laser Direct Writing Technique 48
3.2.2 Characterization 49
3.2.3 Fabrication by Focused Ion Beam Lithography 59
3.2.4 Characterization 61
3.3 Conclusions 63
References 64
4 Design and Development of Some SU-8 Wire Waveguide Structures 66
4.1 Introduction 66
4.2 Optical Directional Couplers 67
4.2.1 Design 67
4.2.2 Computed Results 69
4.2.3 Fabrication 71
4.2.4 Characterization 73
4.3 Micro-ring Resonator 76
4.3.1 Design 77
4.3.2 Computed Results 78
4.3.3 Fabrication 80
4.3.4 Characterization 80
4.3.5 Discussions 84
4.4 Photonic Crystal Structure on Waveguide 85
4.4.1 Design and Simulation 86
4.4.2 Fabrication 86
4.4.3 Characterization 88
4.4.4 Discussions 89
4.5 Conclusions 90
References 90
5 Design and Development of Polarization-Independent Power Splitter Using Coupled Silicon Waveguides 93
5.1 Introduction 93
5.2 Power Splitter Using Coupled Silicon Wire Waveguides 93
5.2.1 Design and Analysis 93
5.2.2 Computed Results 95
5.2.3 Discussions 98
5.3 Power Splitter Using Coupled Silicon Rib Waveguides 98
5.3.1 Design and Analysis 98
5.3.2 Computed Results 100
5.3.3 Fabrication 102
5.3.4 Characterization 104
5.4 Conclusions 107
References 108
6 Conclusions and Future Scope of Work 109
6.1 Summary 109
6.2 Contributions and Achievements 109
6.3 Limitations of the Present Work and Scopes of Future Research 111
References 112

Erscheint lt. Verlag 16.11.2019
Reihe/Serie Manufacturing and Surface Engineering
Manufacturing and Surface Engineering
SpringerBriefs in Applied Sciences and Technology
SpringerBriefs in Applied Sciences and Technology
Zusatzinfo XVII, 100 p.
Sprache englisch
Themenwelt Naturwissenschaften Physik / Astronomie Optik
Technik Elektrotechnik / Energietechnik
Schlagworte Fabrication • Micro Ring Resonator • Photonic Crystal • Photonic devices • Power Splitter • Silicon • SU-8 Polymer • Waveguides
ISBN-10 981-15-1311-2 / 9811513112
ISBN-13 978-981-15-1311-4 / 9789811513114
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