Etching in Microsystem Technology

M Köhler (Autor)

Software / Digital Media

384 Seiten

2007
Wiley-VCH Verlag GmbH (Hersteller)
978-3-527-61378-6 (ISBN)

Infos

Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices.
The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching processes coming from chemistry, physics, and engineering.
The book is divided into two sections: the wet and dry etching processes are presented in the first, general, section, which provides the scientific fundamentals, while a catalog of etching bath composition, etching instructions, and parameters can be found in the second section. This section will enhance the comprehension of the general section and also give an overview of data that are essential in practice.

Autor

Michael Koehler is Professor of Physical Chemistry and Micro-reaction Technology at the Technical University of Ilmenau, Germany, since 2001 and at the same time Visiting Scientist at the Institute for Physical High Technology in Jena, also Germany. His research work concerns chip-based reaction technology, with interests focusing around molecular nanotechnology such as biotechnical microprocesses and DNA nanoparticle adducts. He studied chemistry in Halle an der Saale and Jena, obtaining his diploma in 1981. After completing his Ph.D. on electrochemical effects in microlithography, he worked from 1986 to 1990 as project leader at the Institute of Physical Technology of the Academy of Sciences of the GDR, researching into submicrometre lithography. After the reunification of Germany, he visited the Max Planck Institute of Nutritional Physiology in Dortmund. In 1991, he returned to Jena to join the IPHT as group leader for microstructuring, taking over the department for microsystem technology in 1994. Parallel to these appointments, in 1992 he completed his habilitation in general and physical chemistry, giving lectures as Wuppertal University and serving from 1993 on as lecturer at the Friedrich-Schiller Universite in Jena for microlithography, microsystem technology and nanotechnology.

Produkt-Details

• Erscheint lt. Verlag: 29.12.2007
• Verlagsort: Weinheim
• Sprache: englisch
• Maße: 186 x 246 mm
• Gewicht: 856 g
• Themenwelt: Naturwissenschaften ► Chemie
• ISBN-10: 3-527-61378-1 / 3527613781
• ISBN-13: 978-3-527-61378-6 / 9783527613786
• Zustand: Neuware