Compact Plasma and Focused Ion Beams

Sudeep Bhattacharjee (Autor)

Buch | Softcover

392 Seiten

2017
CRC Press (Verlag)
978-1-138-03367-2 (ISBN)

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This book discusses method to produce compact microwave plasma by overcoming challenges posed by geometrical cutoff of waveguide and density cutoff of plasma alongwith the properties of such compact plasmas. It also brings out a new area of applications where such compact high densities plasmas are utilized for multi-element focused ion beams.

Sudeep Bhattacharjee

IntroductionPlasmaParticle InteractionsSome Basic Plasma PropertiesCriterion for the Definition of a PlasmaDifferent Types of PlasmasDescription of PlasmasTheoretical ApproachesMicrowave-Generated PlasmasCompact Microwave Plasma SourcesResearch Objective and MethodsReferencesReview of the Cutoff ProblemA Brief History of Earlier WorkMicrowave Propagation in WaveguidesPlasma Density CutoffReferencesPlasma and Wave DiagnosticsPlasma Diagnostics with Langmuir's ProbesDesign of Electromagnetic ProbesReferencesGenesis of a Wave Induced Discharge: A New PerspectiveIntroductionHistorical Development of Breakdown StudiesModeling of the Electron DynamicsDevelopment of the General AlgorithmField-Free Case: Three-Dimensional Random WalkElectron Transport in the Presence of an EM FieldMagnetostatically Assisted Electron Transport in the Presence of an EM FieldElectric Field Effects and the Random Walk ParameterLinear and Circularly Polarized WavesSummary and ConclusionReferencesPlasma Production in Continuous-Mode Microwaves: Near-Circular MulticuspIntroductionApparatusMulticusp DesignWaveguide DesignExperimental ResultsSpatial Profiles of the PlasmaDiscussionConclusionsReferencesPlasma Production in Continuous-Mode Microwaves: Rectangular Nonmulticusp WaveguideIntroductionExperimental ProceduresExperimental ResultsDiscussionConclusionsReferencesComparison of Square and Near-Circular Multicusp WaveguidesIntroductionWaveguide DesignExperimental ResultsDiscussionConclusionsSummary of Experimental Results in Continuous-Mode MicrowavesSummary of the Plasma Production MechanismsReferencesPlasma Production in Pulsed-Mode Microwaves: General ExperimentIn

Erscheinungsdatum	14.05.2017
Zusatzinfo	11 Tables, black and white; 207 Illustrations, black and white
Verlagsort	London
Sprache	englisch
Maße	156 x 234 mm
Gewicht	453 g
Themenwelt	Naturwissenschaften ► Physik / Astronomie ► Atom- / Kern- / Molekularphysik
	Naturwissenschaften ► Physik / Astronomie ► Plasmaphysik
	Technik ► Elektrotechnik / Energietechnik
ISBN-10	1-138-03367-7 / 1138033677
ISBN-13	978-1-138-03367-2 / 9781138033672
Zustand	Neuware