Helium Ion Microscopy

Gregor Hlawacek, Armin Gölzhäuser (Herausgeber)

Buch | Hardcover

XXIII, 526 Seiten

2016 | 1st ed. 2016
Springer International Publishing (Verlag)
978-3-319-41988-6 (ISBN)

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This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.

Introduction- Microscopy.- Analytics- Nanoengineering.

Erscheinungsdatum	25.10.2016
Reihe/Serie	NanoScience and Technology
Zusatzinfo	XXIII, 526 p. 320 illus., 204 illus. in color.
Verlagsort	Cham
Sprache	englisch
Maße	155 x 235 mm
Themenwelt	Naturwissenschaften ► Chemie ► Analytische Chemie
	Naturwissenschaften ► Chemie ► Physikalische Chemie
	Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik
	Technik ► Maschinenbau
Schlagworte	Atomic scale simulation of ion scattering • Chemistry and Materials Science • Gas field ion source • Helium Ion Microscopy • high-resolution imaging • Imaging of biological samples • Ion Beam techniques • Microscopy contrast formation • Monte Carlo simulation of sputter yields • Nanofabrication • Nanotechnology and Microengineering • SIMS in HIM • Spectroscopy and Microscopy • Surface and Interface Science, Thin Films • Surfaces and Interfaces, Thin Films
ISBN-10	3-319-41988-9 / 3319419889
ISBN-13	978-3-319-41988-6 / 9783319419886
Zustand	Neuware