Nanolithography (eBook)

A Borderland between STM, EB, IB, and X-Ray Lithographies

M. Gentili, Carlo Giovannella, Stefano Selci (Herausgeber)

eBook Download: PDF

2013
Springer Netherlands (Verlag)
978-94-015-8261-2 (ISBN)

Infos

Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).

Produkt-Details

• Erscheint lt. Verlag: 9.3.2013
• Sprache: englisch
• Themenwelt: Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik
• Themenwelt: Naturwissenschaften ► Physik / Astronomie ► Thermodynamik
• ISBN-10: 94-015-8261-0 / 9401582610
• ISBN-13: 978-94-015-8261-2 / 9789401582612