Fringe Pattern Analysis for Optical Metrology
Wiley-VCH (Verlag)
978-3-527-41152-8 (ISBN)
Manuel Servin received his engineering diploma from the École Nationale Supérieure des Télécommunications in France (1982), and his Ph.D. from the Centro de Investigaciones en Óptica A. C. (CIO) at Leon Mexico in 1994. He is co-author of the book `Interferogram Analysis for Optical Testing?. Dr. Servin has published more than 100 papers in scientific peer-reviewed journals on Digital Interferometry and Fringe Analysis. Juan Antonio Quiroga received his Ph.D. in physics in 1994 from the Universidad Complutense de Madrid, Spain. He is now teaching there at the Physics Faculty. His current principal areas of interest are Digital image processing applied to Optical Metrology and applied optics Moises Padilla is a Ph.D. student in optical sciences at the Centro de Investigaciones en Óptica (CIO) at León Mexico. He is associated with the optical metrology division of the CIO. His research activities are in digital signal processing and electrical communication engineering applied to processing and analysis of optical interferogram images.
Chapter 1 Digital Linear Systems
1.1 Introduction
1.2 Digital Sampling
1.3 Linear time-invariant (LTI) systems
1.4 Z-transform analysis of digital linear systems
1.5 Fourier analysis of digital linear systems
1.6 Convolution one-dimensional digital filters
1.7 Convolution two-dimensional linear filters
1.8 Linear regularized filtering techniques
1.9 Stochastic processes
1.10 Linear quadrature filters
Chapter 2 Synchronous Temporal Interferometry
2.1 Introduction
2.2 The temporal carrier interferometric signal
2.3 Quadrature linear filters for phase estimation
2.4 The minimum 3-step PSA
2.5 Least-squares PSAs
2.6 Detuning in temporal interferometry
2.7 Noise in temporal interferometry
2.8 Harmonics in temporal interferometry
2.9 Quadrature filters design by 1st-order building blocks
2.10 Some further topics in linear PSAs theory
Chapter 3 Asynchronous Temporal Interferometry
3.1 Introduction
3.2 Spectral analysis of the Carré algorithm
3.3 Spectral analysis of other self-tunable PSAs
3.4 Self-calibrating PSAs
Chapter 4 Spatial Methods with Carrier
4.1 Introduction
4.2 Linear spatial carrier
4.3 Circular spatial carrier interferogram
4.4 2D Pixelated Spatial Carrier
4.5 Regularized Quadrature Filters
4.6 Relation Between Temporal and Spatial Analysis
Chapter 5 Spatial Methods without Carrier
5.1 Introduction
5.2 Phase demodulation of closed-fringe interferograms
5.3 The Regularized Phase Tracker (RPT)
5.4 Local Robust Quadrature Filters 231
5.5 2D Fringe Direction
5.6 2D Vortex Filter
5.7 The General Quadrature Transform
Chapter 6 Phase Unwrapping
6.1 Introduction
6.2 Phase unwrapping with by 1D line integration
6.3 Phase unwrapping with 1D IIR filters
6.4 1D phase unwrapping with linear prediction
6.5 2D phase unwrapping with linear prediction
6.6 Least-squares method for phase unwrapping
6.7 Phase unwrapping through demodulation using a phase tracker
6.8 Smooth unwrapping with 2D detection of phase inconsistencies
6.9 Quality Maps and Branch Cut Methods
Appendix
List of linear phase-shifting algorithms (PSAs)
"I recommend this book for several reasons: it provides great insights into the principles and practical applications of classical and advanced interferometry in optical metrology, and it presents the main algorithms for recovering the modulating phase from single or multiple patterns." ( Optics & Photonics , 8 October 2014)
| Erscheint lt. Verlag | 2.7.2014 |
|---|---|
| Sprache | englisch |
| Maße | 170 x 244 mm |
| Gewicht | 896 g |
| Themenwelt | Naturwissenschaften ► Physik / Astronomie ► Optik |
| Schlagworte | Chemie • Chemistry • Electrical & Electronics Engineering • Electrical & Electronics Engineering • Elektrotechnik u. Elektronik • Messen (Technik) • Messtechnik • Optics & Photonics • Optics & Photonics • Optik • Optik u. Photonik • Optische Messtechnik • Physics • Physik • Sensoren, Instrumente u. Messung • Sensors, Instrumentation & Measurement • Sensors, Instrumentation & Measurement • spectroscopy • Spektroskopie |
| ISBN-10 | 3-527-41152-6 / 3527411526 |
| ISBN-13 | 978-3-527-41152-8 / 9783527411528 |
| Zustand | Neuware |
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