Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System

Seiji Samukawa (Autor)

Buch | Softcover

40 Seiten

2014 | 2014 ed.
Springer Verlag, Japan
978-4-431-54794-5 (ISBN)

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This book provides for the first time a good understanding of the etching profile technologies that do not disturb the plasma. Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors in the plasma processing and prediction system of real etching profiles based on monitoring data. Readers are made familiar with these sensors, which can measure real plasma process surface conditions such as defect generations due to UV-irradiation, ion flight direction due to charge-up voltage in high-aspect ratio structures and ion sheath conditions at the plasma/surface interface. The plasma etching profile realistically predicted by a computer simulation based on output data from these sensors is described.

Prof. Seiji Samukawa Distinguished Professor in Tohoku University Professor in Institute of Fluid Science, Professor and Principal Investigator, WPI-AIMR in Tohoku University.

Introduction.- On-wafer UV sensor and prediction of UV irradiation damage.- Prediction of Abnormal Etching Profiles in High-aspect-ratio Via/Hole Etching Using On-wafer Monitoring System.- Feature Profile Evolution in Plasma Processing Using Wireless On-wafer Monitoring System.

Reihe/Serie	SpringerBriefs in Applied Sciences and Technology
Zusatzinfo	30 Illustrations, color; 5 Illustrations, black and white; VIII, 40 p. 35 illus., 30 illus. in color. With online files/update.
Verlagsort	Tokyo
Sprache	englisch
Maße	155 x 235 mm
Themenwelt	Naturwissenschaften ► Physik / Astronomie ► Plasmaphysik
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Schlagworte	Etching Profile • On-wafer Monitoring Technique • On-wafer UV Sensor • ULSI • Ultralarge Scaled Integrated Circuit • Ultralarge-scale integrated circuit (ULSI)
ISBN-10	4-431-54794-0 / 4431547940
ISBN-13	978-4-431-54794-5 / 9784431547945
Zustand	Neuware