A User's Guide to Vacuum Technology (eBook)

John F. O'Hanlon (Autor)

eBook Download: PDF

2005 | 3. Auflage
536 Seiten
John Wiley & Sons (Verlag)
978-0-471-46715-1 (ISBN)

Infos

In the decade and a half since the publication of the Second
Edition of A User?s Guide to Vacuum Technology there have
been many important advances in the field, including spinning rotor
gauges, dry mechanical pumps, magnetically levitated turbo pumps,
and ultraclean system designs. These, along with improved cleaning
and assembly techniques have made contamination-free manufacturing
a reality. Designed to bridge the gap in both knowledge and
training between designers and end users of vacuum equipment, the
Third Edition offers a practical perspective on today?s vacuum
technology. With a focus on the operation, understanding, and
selection of equipment for industrial processes used in
semiconductor, optics, packaging, and related coating technologies,
A User?s Guide to Vacuum Technology, Third Edition provides
a detailed treatment of this important field. While emphasizing the
fundamentals and touching on significant topics not adequately
covered elsewhere, the text avoids topics not relevant to the
typical user.

Autor

JOHN F. O'HANLON, PHD, is Emeritus Professor of Electrical and Computer Engineering at the University of Arizona in Tucson.

Inhalt

Its Basis

1. Vacuum Technology 3

2. Gas Properties 9

3. Gas Flow 25

4. Gas Release from Solids 57

Measurements

5. Pressure Gauges 81

6. Flow Meters 109

7. Pumping Speed 123

8. Residual Gas Analyzers 133

9. Interpretation of RGA Data 161

Production

10. Mechanical Pumps 183

11. Turbomolecular Pumps 201

12. Diffusion Pumps 217

13. Pump Fluids 229

14. Getter and Ion Pumps 247

15. Cryogenic Pumps 263

Materials

16. Materials in Vacuum 289

17. Joints, Seals, and Valves 313

18. Lubrication 345

Systems

19. Rough Vacuum Pumping 359

20. High Vacuum Systems 379

21. Ultraclean Vacuum Systems 403

22. High Flow Systems 415

23. Multichamber Systems 431

24. Leak Detection 447

Symbols 459

Appendixes

A. Units and Constants 463

B. Gas Properties 466

C. Material Properties 478

D. Isotopic Abundances 488

E. Cracking Patterns 492

F. Pump Fluid Properties 498

Index 505

Rezensionen

"...an excellent handbook for engineers, scientists, or anybody who
uses vacuum systems on a regular basis." (IEEE Circuits &
Devices Magazine, May/June 2005)

"...clearly written with...many helpful hints...highly
recommended." (MRS Bulletin, January 2005)

"This book sucks in a good way...the third edition will
never get dusty on my bookshelf...although the text is
certainly not coffee-table reading material, it will have a wide
appeal...it is particularly valuable as a reference for those
who work practically with vacuum technologies and a must-buy for
those who design them." (JOM, February 26, 2004)

"...a fundamental understanding of modern vacuum technology and
a practical user's perspective of laboratory and industrial vacuum
technology. This edition, while still providing core information in
a very practical style...covers many new advances in the
field...there are loads of graphs, data, and tables to provide
practical and useful information to the vacuum user." (IEEE
Electrical Insulation Magazine)

Produkt-Details

• Erscheint lt. Verlag: 18.2.2005
• Sprache: englisch
• Themenwelt: Naturwissenschaften ► Physik / Astronomie
• Themenwelt: Technik ► Elektrotechnik / Energietechnik
• Themenwelt: Technik ► Maschinenbau
• Schlagworte: Component Manufacturing • Electrical & Electronics Engineering • Elektrotechnik u. Elektronik • Komponentenfertigung • Vakuumtechnik
• ISBN-10: 0-471-46715-4 / 0471467154
• ISBN-13: 978-0-471-46715-1 / 9780471467151