Physics of Collisional Plasmas (eBook)

Introduction to High-Frequency Discharges

Michel Moisan, Jacques Pelletier (Autoren)

eBook Download: PDF

2012 | 2012
XXIV, 480 Seiten
Springer Netherland (Verlag)
978-94-007-4558-2 (ISBN)

Infos

Introducing the physics of collisional plasmas as opposed to plasmas in space, this book examines the motion of charged particles, describes their motion according to a hydrodynamic model and explores energy balance. Offers many figures, and solved problems.

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This text is an introduction to the physics of collisional plasmas, as opposed to plasmas in space. It is intended for graduate students in physics and engineering. The first chapter introduces with progressively increasing detail, the fundamental concepts of plasma physic. The motion of individual charged particles in various configurations of electric and magnetic fields is detailed in the second chapter while the third chapter considers the collective motion of the plasma particles described according to a hydrodynamic model. The fourth chapter is most original in that it introduces a general approach to energy balance, valid for all types of discharges comprising direct current(DC) and high frequency (HF) discharges, including an applied static magnetic field. The basic concepts required in this fourth chapter have been progressively introduced in the previous chapters. The text is enriched with approx. 100 figures, and alphabetical index and 45 fully resolved problems. Mathematical and physical appendices provide complementary information or allow to go deeper in a given subject.

Autor

Michel Moisan, Professor in the Physics Department of the Université de Montréal (Québec) is a well-known specialist of HF generated discharges. He currently works on a plasma steriliser for medical devices. He is co-inventor in 31 different patents, including the surfatron and surfaguide surface-wave launchers to sustain HF discharges. Jacques Pelletier is Emeritus Research Director (CNRS) in the Laboratory of Subatomic Physics and Cosmology, Grenoble (France). He designed several generations of plasma-source technologies based on the concept of distributed elementary microwave-plasma sources. He currently works on the design of low-energy plasmas for lighting. He is co-inventor in over 40 patents. Both authors contributed to create the International Laboratory on Plasma Applications and Technologies (LITAP) with research groups from France and Québec working on different aspects of low pressure microwave plasma technologies and their application to certain domains (biology, thin films, etching). They have taught at undergraduate, graduate and postgraduate levels. Through this book, their experience as teachers and researchers in cooperation with industry is made available to all readers interested in the fascinating domain of plasma.

Inhalt

Foreword.- Acknowledgments.- List of symbols.- List of constants.- 1 The Plasma State: Definition and Orders of Magnitude of Principle Quantities.- 1.1 Definition and essential nature of plasma.- 1.2 Areas of research and applications (examples).- 1.3 Different types of laboratory discharges.- 1.4 Electron density and temperature of a plasma.- 1.5 natural oscillation frequency of electrons in a plasma.- 1.6 Debye length: effect of screening in the plasma.- 1.7 Collisional phenomena in plasmas.- 1.8 Mechanisms for creation and loss of charged particles in a plasma and their conservation equation.- 2 Individual Motion of a Charged Particle in Electric and Magnetic Fields.- 2.1 The general equation of motion of a charged particle in E and B fields, and properties of that equation.- 2.2 Analysis of particular cases of E and B.- 3 Hydrodynamic Description of a Plasma.- 3.1 Fundamental aspects of the Boltzmann equation.- 3.2 Velocity distribution function and the notion of correlation between particles.- 3.3 Distribution functions and hydrodynamic quantities.- 3.4 Kinetic and hydrodynamic conductivity of electrons in a plasma in the presence of a HF electromagnetic field.- 3.5 Transport equations.- 3.6 Closure of the transport equations.- 3.7 The Lorentz electron plasma model.- 3.8 Diffusion and mobility of charged particles.- 3.9 Normal modes of diffusion and spatial density distribution of charged particles.- 3.10 The ambipolar diffusion regime.- 3.11 Ambipolar diffusion in a static magnetic field.- 3.12 Diffusion regime or free fall regime.- 3.13 Electron temperature of a long plasma column governed by ambipolar diffusion: scaling law Te(pR).- 3.14 Formation and nature of sheaths at the plasma-wall.- 4 Introduction to the Physics of HF Discharges.- 4.1 Foreword.- 4.2 Power transfer from the electric field to the discharge.- 4.3 Influence of the frequency of the HF field on some plasma properties and on particular processes.- 4.4 High-pressure HF sustained plasmas.- Appendix I. Properties of the Maxwell-Boltzmann velocity distribution.- Appendix II The complete Saha equation.- Appendix III Partial local thermodynamic equilibrium.- Appendix IV Representation of binary collisions in the center of mass and laboratory frames.- Appendix V Limiting the range of the Coulomb collisional interactions: the Coulomb logarithm.- Appendix VI Step-wise ionisation.- Appendix VII Basic notions of tensors.- Appendix VIII Operations on tensors.- Appendix IX Orientation of w in the reference triad with Cartesian axes.- Appendix X Force acting on a charged particle in the direction of a magnetic field weakly non-uniform axially: variant of (2.177).- Appendix XI The magnetic moment.- Appendix XII Drift velocity w of a charged particle subjected to an arbitrary force F in a field B: the magnetic drift.- Appendix XIII Magnetic-field drift velocity in the Frenet frame associated with the lines of force of a magnetic field with weak curvature.- Appendix XIV Spherical harmonics.- Appendix XV Expressions for the terms M and R in the kinetic pressure transport equation.- Appendix XVI Closure of the hydrodynamic transport equation for kinetic pressure in the case of adiabatic compression.- Appendix XVII Complimentary calculations for the Te(pR) relation.- Appendix XVIII Propagation of an electromagnetic plane wave in a plasma and the skin depth.- Appendix XIX Surface-wave plasmas (SWP).- Appendix XX Useful integrals and expressions for the differential operators in various coordinate systems.- References.- Recommended reading.- Index.

Produkt-Details

• Erscheint lt. Verlag: 20.6.2012
• Verlagsort: Dordrecht
• Sprache: englisch
• Original-Titel: Physique des Plasmas Collisionnels
• Themenwelt: Naturwissenschaften ► Physik / Astronomie ► Angewandte Physik
• Themenwelt: Naturwissenschaften ► Physik / Astronomie ► Plasmaphysik
• Themenwelt: Naturwissenschaften ► Physik / Astronomie ► Strömungsmechanik
• Themenwelt: Naturwissenschaften ► Physik / Astronomie ► Theoretische Physik
• Themenwelt: Technik
• Schlagworte: Ambipolar diffusion regime • Collisions in low-temperature plasmas • Electron-cyclotron-resonance discharge • Industrial applications of plasma discharges • Introduction to cold plasmas • Modeling of HF discharges • Plasma discharges in the microelectronic industry • Principles of plasma science and technology • Textbook on plasma physics • Wall-plasma interface
• ISBN-10: 94-007-4558-3 / 9400745583
• ISBN-13: 978-94-007-4558-2 / 9789400745582