Lock-in Thermography (eBook)

Basics and Use for Evaluating Electronic Devices and Materials

Otwin Breitenstein, Wilhelm Warta, Martin Langenkamp (Autoren)

eBook Download: PDF

2010 | 2nd ed. 2010
X, 258 Seiten
Springer Berlin (Verlag)
978-3-642-02417-7 (ISBN)

Infos

This is the first book on lock-in thermography, an analytical method applied to the diagnosis of microelectronic devices. This useful introduction and guide reviews various experimental approaches to lock-in thermography, with special emphasis on the lock-in IR thermography developed by the authors themselves.

Otwin Breitenstein studied physics at Leipzig university and graduated there in 1980. After dealing with spatially resolved capacitance spectroscopy of point defects (Scanning-DLTS) at the Institute of Solid State Physics and Electron Microscopy in Halle until 1992, he is a scientific staff member at Max Planck Institute of Microstructure Physics, Halle. His main interest field is electronic device and materials analysis by electron microscopic and IR-based methods. Wilhelm Warta studied Physics at Würzburg and then Stuttgart University, where he graduated and received his PhD with research on charge transport properties of organic molecular crystals. 1985 he joined Fraunhofer Institute for Solar Energy Systems in Freiburg starting with work on carrier lifetime measurement techniques for semiconductor materials. His fields are the development of measurement techniques for solar cell development, characterization of solar cell material and solar cells, device and process simulation as well as high precision calibration of solar cells.

Inhalt

Lock-inThermography 4
Preface 6
Preface of the 1st edition 8
Contents 10
1 Introduction 12
2 Physical and Technical Basics 18
3 Experimental Technique 71
4 Theory 110
5 Measurement Strategies 157
6 Typical Applications 184
7 Summary and Outlook 236
References 241
A Thermal and IR Properties of Selected Materials 251
List of Symbols 252
Abbreviations 256
Index 258

Produkt-Details

• Erscheint lt. Verlag: 5.9.2010
• Reihe/Serie: Springer Series in Advanced Microelectronics
• Reihe/Serie: Springer Series in Advanced Microelectronics
• Zusatzinfo: X, 258 p. 89 illus., 33 illus. in color.
• Verlagsort: Berlin
• Sprache: englisch
• Themenwelt: Naturwissenschaften ► Physik / Astronomie
• Themenwelt: Technik ► Elektrotechnik / Energietechnik
• Themenwelt: Technik ► Maschinenbau
• Schlagworte: Diagnosis • Failure analysis • Lifetime mapping • Shunt imaging • Solar cell characterization • Thermography • Trap density mapping
• ISBN-10: 3-642-02417-3 / 3642024173
• ISBN-13: 978-3-642-02417-7 / 9783642024177