Spectroscopic Ellipsometry and Reflectometry

A User's Guide

Harland G. Tompkins, William A. McGahan (Autoren)

Buch | Hardcover

248 Seiten

1999
Wiley-Interscience (Verlag)
978-0-471-18172-9 (ISBN)

Artikel merken

While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.

Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola. William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.

Perspective and History.

Fundamentals.

Optical Properties of Materials and Layered Structures.

Instrumentation.

The Anatomy of a Reflectance Spectrum.

Aspects of Single-Wavelength Ellipsometry.

The Anatomy of an Ellipsometric Spectrum.

Analytical Methods and Approach.

Optical Data Analysis.

Quality Assurance.

Very Thin Films.

Roughness.

Appendices.

Index.

Erscheint lt. Verlag	6.4.1999
Sprache	englisch
Maße	160 x 240 mm
Gewicht	533 g
Themenwelt	Naturwissenschaften ► Physik / Astronomie ► Optik
Themenwelt	Technik ► Maschinenbau
ISBN-10	0-471-18172-2 / 0471181722
ISBN-13	978-0-471-18172-9 / 9780471181729
Zustand	Neuware