Scanning Electron Microscopy

Physics of Image Formation and Microanalysis

Ludwig Reimer (Autor)

Buch | Softcover

XIV, 529 Seiten

2010 | 2. Softcover reprint of the original 2nd ed. 1998
Springer Berlin (Verlag)
978-3-642-08372-3 (ISBN)

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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.

"...this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM."

T Mulvey, Measurement Science and Technology. 11, No12, December 2000

Erscheint lt. Verlag	1.12.2010
Reihe/Serie	Springer Series in Optical Sciences
Mitarbeit	Gast Herausgeber: P.W. Hawkes
Zusatzinfo	XIV, 529 p.
Verlagsort	Berlin
Sprache	englisch
Maße	155 x 235 mm
Gewicht	806 g
Themenwelt	Naturwissenschaften ► Chemie ► Analytische Chemie
	Naturwissenschaften ► Chemie ► Physikalische Chemie
	Naturwissenschaften ► Physik / Astronomie ► Atom- / Kern- / Molekularphysik
	Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik
Schlagworte	Crystal • diffraction • Electron Microscope • electron microscopy • Electron optics • Microscopy • Optics • Rasterelektronen Mikroskopie • scanning electron microscope • Scanning Tunneling Microscopy
ISBN-10	3-642-08372-2 / 3642083722
ISBN-13	978-3-642-08372-3 / 9783642083723
Zustand	Neuware