MEMS

Fundamental Technology and Applications

Vikas Choudhary, Krzysztof Iniewski (Herausgeber)

Buch | Softcover

478 Seiten

2017
CRC Press (Verlag)
978-1-138-07230-5 (ISBN)

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The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world.

The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including:

Thin-film integrated passives as an alternative to discrete passives
The possibility of piezoelectric MEMS
Solutions for MEMS gyroscopes
Advanced interconnect technologies
Ambient energy harvesting
Bulk acoustic wave resonators
Ultrasonic receiver arrays using MEMS sensors
Optical MEMS-based spectrometers
The integration of MEMS resonators with conventional circuitry
A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns
Wireless microactuators to enable implantable MEMS devices for drug delivery
MEMS technologies for tactile sensing and actuation in robotics
MEMS-based micro hot-plate devices
Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring
Sensors using passive acousto-electric devices in wired and wireless systems

Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

Vikas Choudhary is currently a senior manager of MEMS and Sensor Technology Group at Analog Devices, where he is involved in design and management of products for Inertial MEMS. He also manages a team of engineers involved in the design of high-performance precision analog-to-digital converters. Vikas has more than 18 years of experience in the semiconductor industry, including as the architect and lead designer for several RFIC subsystems such as 802.16e and 802.11n. He has held various management and design positions at PMC-Sierra, Inc., Texas Instruments, and STMicroelectronics. He has three issued patents. His current research interests are in the field of applied signal processing for high-performance analog circuits and systems. Krzysztof (Kris) Iniewski manages R&D at Redlen Technologies, Inc., a startup company in Vancouver, Canada. He is also the president of CMOS Emerging Technologies Research Inc., an organization of high-tech events covering communications, microsystems, optoelectronics, and sensors. Dr. Iniewski has held numerous faculty and management positions at the University of Toronto, University of Alberta, Simon Fraser University, and PMC-Sierra, Inc. He has published more than 100 research papers in international journals and conferences. He holds 18 international patents granted in the United States, Canada, France, Germany, and Japan. He is a frequent invited speaker, has consulted for multiple organizations internationally, and has written and edited several books.

Breakthrough Technology: Microsystems to Nano-Microsystems: A Technological Breakthrough. HfO2-Based High-κ Dielectrics for Use in MEMS Applications. Piezoelectric Thin Films for MEMS Applications. CMOS Systems and Interfaces for sub-deg/hr Microgyroscopes. Bulk Acoustic Wave Gyroscopes. Mechanically Flexible Interconnects and TSVs: Applications in CMOS/MEMS Integration. Modeling of Piezoelectric MEMS Vibration Energy Harvesters. Interface Circuits for Capacitive MEMS Gyroscopes. Electromechanical Loops for High-Performance and Robust Gyroscope System Design. MEMS-Based Novel Applications: Bulk Acoustic Wave Resonators for Mobile Communication Systems. Wideband Ultrasonic Transmitter and Sensor Array for In-Air Applications. MEMS-Based Lamellar Grating Fourier Transform Spectrometers. Microelectromechanical Resonators for RF Applications. Rigid Body Motion Capturing by Means of Wearable Inertial and Magnetic MEMS Sensor Assembly—From Reconstitution of the Posture toward Dead Reckoning: An Application in Bio-Logging. Radio-Controlled Wireless MEMS Actuators and Applications. Advanced MEMS Technologies for Tactile Sensing and Actuation. MEMS-Based Micro Hot-Plate Devices. A Wireless Sensor Networks Enabled Inertial Sensor. Passive Radio-Frequency Acoustic Sensors and Systems for Wired and Wireless Applications. Index.

Erscheinungsdatum	22.04.2017
Reihe/Serie	Devices, Circuits, and Systems
Zusatzinfo	32 Tables, black and white; 369 Illustrations, black and white
Verlagsort	London
Sprache	englisch
Maße	174 x 246 mm
Gewicht	453 g
Themenwelt	Medizin / Pharmazie ► Physiotherapie / Ergotherapie ► Orthopädie
	Technik ► Elektrotechnik / Energietechnik
	Technik ► Maschinenbau
	Technik ► Medizintechnik
ISBN-10	1-138-07230-3 / 1138072303
ISBN-13	978-1-138-07230-5 / 9781138072305
Zustand	Neuware