Dynamics of Microelectromechanical Systems
Seiten
2010
|
Softcover reprint of hardcover 1st ed. 2007
Springer-Verlag New York Inc.
978-1-4419-4225-8 (ISBN)
Springer-Verlag New York Inc.
978-1-4419-4225-8 (ISBN)
A textbook for senior undergraduate and graduate level students that offers a novel and systematic look into the dynamics of MEMS. It includes numerous solved examples together with the proposed problems.
Dynamics of Microelectromechanical Systems is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.
Features of this work include:
An in-depth treatment of problems that involve reliable modeling, analysis and design,
Analytical models with correct dependences on service dimensions,
Cantilever based systems for nanofabrication researchers and designers, and
Dynamics of complex spring and beam microsystems.
This material contains numerous fully-solved examples as well as many end-of-the-chapter problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. An instructor's solution manual is available on the book's webpage at springer.com.
Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.
Dynamics of Microelectromechanical Systems is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.
Features of this work include:
An in-depth treatment of problems that involve reliable modeling, analysis and design,
Analytical models with correct dependences on service dimensions,
Cantilever based systems for nanofabrication researchers and designers, and
Dynamics of complex spring and beam microsystems.
This material contains numerous fully-solved examples as well as many end-of-the-chapter problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. An instructor's solution manual is available on the book's webpage at springer.com.
Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.
Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies.- Micromechanical Systems: Modal Analysis.- Energy Losses in MEMS and Equivalent Viscous Damping.- Frequency and Time Response of MEMS.
| Erscheint lt. Verlag | 23.11.2010 |
|---|---|
| Reihe/Serie | Microsystems ; 17 |
| Zusatzinfo | X, 403 p. |
| Verlagsort | New York, NY |
| Sprache | englisch |
| Maße | 155 x 235 mm |
| Themenwelt | Informatik ► Weitere Themen ► CAD-Programme |
| Technik ► Elektrotechnik / Energietechnik | |
| Technik ► Maschinenbau | |
| Schlagworte | Damping • Dynamics • Electrical • energy losses • flexure hinges • frequency-domain analysis • impedance • linear/nonlinear problems • Lobontiu • mechanical-electrical analogy • Mechanics • MEMS • micro • microaccelerometers • microbridges • microcantilevers • microgyroscopes • Nano • Quality (Q) Factor • resonant mass detection • slide-film damping • squeeze-film damping • state-space modeling • substrate losses • thermoelastic losses • time-domain analysis • Transfer Function • tuning forks • vibrations |
| ISBN-10 | 1-4419-4225-4 / 1441942254 |
| ISBN-13 | 978-1-4419-4225-8 / 9781441942258 |
| Zustand | Neuware |
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