Fabrication and Design of Resonant Microdevices (eBook)

Fabrication & Design of Resonant Microdevices

Behraad Bahreyni (Autor)

eBook Download: EPUB

2008
250 Seiten
Elsevier Science (Verlag)
978-0-08-094757-0 (ISBN)

Infos

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices - important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.* Offers numerous academic and industrial examples of resonant MEMS* Provides an analytic model of device behavior* Explains two-port systems in detail* Devotes ample space to excitation and signal detection methods* Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Produkt-Details

• Erscheint lt. Verlag: 20.10.2008
• Sprache: englisch
• Themenwelt: Technik ► Elektrotechnik / Energietechnik
• Themenwelt: Technik ► Maschinenbau
• ISBN-10: 0-08-094757-3 / 0080947573
• ISBN-13: 978-0-08-094757-0 / 9780080947570