Handbook of Sputter Deposition Technology

Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS

Kiyotaka Wasa (Autor)

Buch | Hardcover

660 Seiten

2012 | 2nd edition
William Andrew Publishing (Verlag)
978-1-4377-3483-6 (ISBN)

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Faetures a team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. This book introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.

This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems.

Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.

Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions.

Thin Film and Nano-materials
Thin Film and Nanomaterial Processes
Sputtering Phenomena
Computer Simulation of Sputtering
Sputtering Systems
Deposition of Compound Thin Films
Nanometer Materials and Devices
Microfabrications

Erscheint lt. Verlag	26.10.2012
Verlagsort	Norwich
Sprache	englisch
Maße	152 x 229 mm
Gewicht	1030 g
Themenwelt	Naturwissenschaften ► Chemie ► Physikalische Chemie
	Technik ► Elektrotechnik / Energietechnik
	Technik ► Maschinenbau
ISBN-10	1-4377-3483-9 / 1437734839
ISBN-13	978-1-4377-3483-6 / 9781437734836
Zustand	Neuware